T
Toshihiko Tanaka
Researcher at Renesas Electronics
Publications - 1
Citations - 22
Toshihiko Tanaka is an academic researcher from Renesas Electronics. The author has contributed to research in topics: Photomask & Resist. The author has an hindex of 1, co-authored 1 publications receiving 22 citations.
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Patent
Method for manufacturing an electronic device
TL;DR: In this paper, a photomask pattern is formed using as an opaque element a resist comprising a base resin and Si incorporated therein or a resist with a metal such as Si incorporated thereby by a silylation process, to improve the resistance to active oxygen.