V
Vu Q. Bui
Researcher at IBM
Publications - 3
Citations - 30
Vu Q. Bui is an academic researcher from IBM. The author has contributed to research in topics: Plasma etching & Buffer gas. The author has an hindex of 2, co-authored 3 publications receiving 30 citations.
Papers
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Patent
Plasma etch enhancement with large mass inert gas
TL;DR: In this paper, a process for plasma cleaning and an improved gas mixture for use in a plasma cleaning process are presented. But the present method requires the use of a small percentage of a large mass inert gas such as Argon or Krypton.
Patent
Plasma etching with a large molecular mass inert gas
TL;DR: The gas mixture of the present invention includes the normal process gases such as oxygen and carbon tetrafluoride as mentioned in this paper, but the mixture also includes a small percentage of a large mass inert gas such as Argon or Krypton.