An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide semiconductor film typified by zinc oxide, and a manufacturing method thereof. For the semiconductor device, a gate electrode is formed over a substrate; a gate insulating film is formed covering the gate electrode; an oxide semiconductor film is formed over the gate insulating film; and a first conductive film and a second conductive film are formed over the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel region.

Semiconductor device, and manufacturing method thereof

Multiple sequential processes are conducted in a reaction chamber to form ultra high quality silicon-containing compound layers, including silicon nitride layers. In a preferred embodiment, a silicon layer is deposited on a substrate using trisilane as the silicon precursor. A silicon nitride layer is then formed by nitriding the silicon layer. By repeating these steps, a silicon nitride layer of a desired thickness is formed.

Method to form ultra high quality silicon-containing compound layers

Silicon alloys and doped silicon films are prepared by chemical vapor deposition and ion implantation processes using Si-containing chemical precursors as sources for Group III and Group V atoms. Preferred dopant precursors include (H3Si)3-xMRx, (H3Si)3N, and (H3Si)4N2, wherein R is H or D, x = 0, 1 or 2, and M is selected from the group consisting of B, P, As, and Sb. Preferred deposition methods produce non-hydrogenated silicon alloy and doped Si-containing films, including crystalline films.

Dopant precursors and processes

Atomic layer or cyclic plasma etching chemistries and processes to etch films are disclosed. Films include Si, Ti, Ta, W, Al, Pd, Ir, Co, Fe, B, Cu, Ni, Pt, Ru, Mn, Mg, Cr, Au, alloys thereof, oxides thereof, nitrides thereof, and combinations thereof.

Atomic layer or cyclic plasma etching chemistries and processes

A method of forming silicon nitride nanodots that comprises the steps of forming silicon nanodots and then nitriding the silicon nanodots by exposing them to a nitrogen containing gas. Silicon nanodots were formed by low pressure chemical vapor deposition. Nitriding of the silicon nanodots was performed by exposing them to nitrogen radicals formed in a microwave radical generator, using N2 as the source gas.

Method of fabricating silicon nitride nanodots

PROBLEM TO BE SOLVED: To enable electroplating with one plating equipment, irrespective of kinds of silicon substrates in the state of a wafer, and make the height of columnar electrodes more uniform, in a semiconductor device having the columnar electrodes formed by electroplating. SOLUTION: A tray 11 for plating is used, in which a recessed part for silicon substrate arrangement is formed in the almost central part of the upper surface of a rectangular insulating substrate 12, and a metal layer 14 is formed in a region except the recessed part for silicon substrate arrangement and specified three edge parts, on the upper surface of the insulating substrate 12. A silicon substrate 21 in a wafer state is arranged in the recessed part for silicon substrate arrangement, a plating resist pattern 34 is formed, electroplating is performed by using the metal layer 14 or the like as a plating current path of one side, and columnar electrodes are formed on the silicon substrate 21. In this case, dummy columnar electrodes are formed on the metal layer 14 in the peripheral part of the silicon substrate 21.

Wakabayashi Takeshi

Papers

Manufacture of semiconductor device