A three-dimensional imaging system includes a two-dimensional array (230) of pixel light sensing detectors and dedicated electronics and associated processing circuitry fabricated on a common IC (210) using CMOS fabrication techniques. In one embodiment, each detector (240) has an associated high speed counter (250) that accumulates clock pulses in number directly proportional to time of flight (TOF) for a system-emitted pulse to reflect from an object point and be detected by a pixel detector focused upon that point. The TOF data provides a direct digital measure of distance from the particular pixel to a point on the object reflecting the emitted light pulse. In a second embodiment, the counters and high speed clock circuits are eliminated, and instead each pixel detector (240) is provided with a charge accumulator (600) and an electronic shutter (SI) such that each pixel detector accumulates charge, the amount of which provides a direct measure of round-trip TOF.

Cmos-compatible three-dimensional image sensor ic

A method is described that involves identifying one or more images of respective one or more fixed markers. Each marker is positioned on or proximate to a display. The images appear on a pixilated sensor within a handheld device. The method also involves determining a location on, or proximate to, the display where the handheld device was pointed during the identifying. The method also involves sending from the handheld device information derived from the identifying of the one or more images of respective one or more fixed markers. The method also involves triggering action taken by electronic equipment circuitry in response to the handheld device's sending of a signal to indicate the action is desired.

Handheld vision based absolute pointing system

A compression and decompression system in which a reversible wavelet filter are used to generates coefficients from input data, such as image data. The reversible wavelet filter is an efficient transform implemented with integer arithmetic that has exact reconstruction. The present invention uses the reversible wavelet filter in a lossless system (or lossy system) in which an embedded codestream is generated from the coefficients produced by the filter. An entropy coder performs entropy coding on the embedded codestream to produce the compressed data stream.

Method and apparatus for compression using reversible wavelet transforms and an embedded codestream

An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.

Automated photomask inspection apparatus

A compression and decompression method uses a wavelet decompositin, frequency based tree encoding, tree based motion encoding, frequency weighted quantization, Huffman encoding, and/or tree based activity estimation for bit rate control. Forward and inverse quasi-perfect reconstruction transforms are used to generate the wavelet decomposition and to reconstruct data values close to the original data values. The forward and inverse quasi-perfect reconstruction transforms utilize special filters at the boundaries of the data being transformed and/or inverse transformed. Structures and methods are disclosed for traversing wavelet decompositions. Methods are disclosed for increasing software execution speed in the decompression of video. Fixed or variable length tokens are included in a compressed data stream to indicate changes in encoding methods used to generate the compressed data stream.

Data compression and decompression

A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.

Color overlay of scanned and reference images for display

An electronic circuit interconnection system provides high density mounting of ceramic chip-carrier integrated circuit devices or other beam-lead, dual-in-line (DIP), tape- automated-bonded (TAB), flip-chip, or direct-mounted i.c. devices with wire-bonded interconnects or the like on an economical, dimensionally-stable, interconnection substrate which has high heat dissipating properties. The substrate has glass components which are fused onto etched metal patterns and which are proportioned relative to the metal patterns so that the heat-expansion properties of the substrate correspond to those of the i.c. devices to maintain bond integrity between the i.e. leads and circuit paths on the substrate and so that the substrate has sufficient heat-dissipating properties to permit the high density i.e. mounting. The substrates incorporate circuit paths, device mounting pads, edge terminals, pin mounting holes and other typical substrate features in the etched patterns in multi- metal laminated metal plates of selected thickness which are coated on one or both sides with glass frit fused to the plates. Where substrates with more than one layer are desired, glass-coated plates are stacked with pin mounting holes and the like aligned and the glass coatings are fused together. Metal vias extend through the glass coatings where desired to interconnect metal layers of the substrate.

William G. Manns

Papers

Color overlay of scanned and reference images for display

Electronic circuit interconnection system

Pattern comparator with substage illumination and polygonal data representation

Guardbands for pattern inspector

Laser scanner using focusing acousto-optic device