Thermoplastics are highly attractive substrate materials for microfluidic systems, with important benefits in the development of low cost disposable devices for a host of bioanalytical applications. While significant research activity has been directed towards the formation of microfluidic components in a wide range of thermoplastics, sealing of these components is required for the formation of enclosed microchannels and other microfluidic elements, and thus bonding remains a critical step in any thermoplastic microfabrication process. Unlike silicon and glass, the diverse material properties of thermoplastics opens the door to an extensive array of substrate bonding options, together with a set of unique challenges which must be addressed to achieve optimal sealing results. In this paper we review the range of techniques developed for sealing thermoplastic microfluidics and discuss a number of practical issues surrounding these various bonding methods.

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Bonding of thermoplastic polymer microfluidics

This paper briefly overviews progress on the development of MEMS-based micropumps and their applications in drug delivery and other biomedical applications such as micrototal analysis systems (μTAS) or lab-on-a-chip and point of care testing systems (POCT). The focus of the review is to present key features of micropumps such as actuation methods, working principles, construction, fabrication methods, performance parameters and their medical applications. Micropumps have been categorized as mechanical or non-mechanical based on the method by which actuation energy is obtained to drive fluid flow. The survey attempts to provide a comprehensive reference for researchers working on design and development of MEMS-based micropumps and a source for those outside the field who wish to select the best available micropump for a specific drug delivery or biomedical application. Micropumps for transdermal insulin delivery, artificial sphincter prosthesis, antithrombogenic micropumps for blood transportation, micropump for injection of glucose for diabetes patients and administration of neurotransmitters to neurons and micropumps for chemical and biological sensing have been reported. Various performance parameters such as flow rate, pressure generated and size of the micropump have been compared to facilitate selection of appropriate micropump for a particular application. Electrowetting, electrochemical and ion conductive polymer film (ICPF) actuator micropumps appear to be the most promising ones which provide adequate flow rates at very low applied voltage. Electroosmotic micropumps consume high voltages but exhibit high pressures and are intended for applications where compactness in terms of small size is required along with high-pressure generation. Bimetallic and electrostatic micropumps are smaller in size but exhibit high self-pumping frequency and further research on their design could improve their performance. Micropumps based on piezoelectric actuation require relatively high-applied voltage but exhibit high flow rates and have grown to be the dominant type of micropumps in drug delivery systems and other biomedical applications. Although a lot of progress has been made in micropump research and performance of micropumps has been continuously increasing, there is still a need to incorporate various categories of micropumps in practical drug delivery and biomedical devices and this will continue to provide a substantial stimulus for micropump research and development in future.

https://www.nectec.or.th/mems/download/MEMS-based%20Micropumps%20in%20Drug.pdf

MEMS-based micropumps in drug delivery and biomedical applications

Micropumping has emerged as a critical research area for many electronics and biological applications. A significant driving force underlying this research has been the integration of pumping mechanisms in micro total analysis systems and other multi-functional analysis techniques. Uses in electronics packaging and micromixing and microdosing systems have also capitalized on novel pumping concepts. The present work builds upon a number of existing reviews of micropumping strategies by focusing on the large body of micropump advances reported in the very recent literature. Critical selection criteria are included for pumps and valves to aid in determining the pumping mechanism that is most appropriate for a given application. Important limitations or incompatibilities are also addressed. Quantitative comparisons are provided in graphical and tabular forms.

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Recent advances in microscale pumping technologies: a review and evaluation

Adhesion and Adhesives Edited by Dr. R. Houwink and Dr. G. Salomon. Vol. 1: Adhesives. Second, completely revised edition. Pp. xvi + 548. (Amsterdam, London and New York: Elsevier Publishing Company, 1965.) 135s.

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Adhesion and Adhesives

Machines made of soft materials bridge life sciences and engineering1. Advances in soft materials have led to skin-like sensors and muscle-like actuators for soft robots and wearable devices1-3. Flexible or stretchable counterparts of most key mechatronic components have been developed4,5, principally using fluidically driven systems6-8; other reported mechanisms include electrostatic9-12, stimuli-responsive gels13,14 and thermally responsive materials such as liquid metals15-17 and shape-memory polymers18. Despite the widespread use of fluidic actuation, there have been few soft counterparts of pumps or compressors, limiting the portability and autonomy of soft machines4,8. Here we describe a class of soft-matter bidirectional pumps based on charge-injection electrohydrodynamics19. These solid-state pumps are flexible, stretchable, modular, scalable, quiet and rapid. By integrating the pump into a glove, we demonstrate wearable active thermal management. Embedding the pump in an inflatable structure produces a self-contained fluidic 'muscle'. The stretchable pumps have potential uses in wearable laboratory-on-a-chip and microfluidic sensors, thermally active clothing and autonomous soft robots.

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Stretchable pumps for soft machines

This work examines numerous significant process parameters in the solvent-assistant Polymethyl methacrylate (PMMA) bonding scheme and presents two Micro-total-analysis System (μ-TAS) devices generated by adopting the optimal bonding parameters. The process parameters considered were heating temperature, applied loading, duration and solution. The effects of selected process parameters on bonding dimensions loss and strength, and subsequent optimal setting of the parameters were accomplished using Taguchi’s scheme. Additionally, two μ-TAS devices were realized using a static paraffin microvalve and a dynamic diffuser micropump. The PMMA chips were carved using a CO2 laser that patterned device microchannels and microchambers. The operation principles, fabrication processes and experimental performance of the devices are discussed. This bonding technique has numerous benefits, including high bonding strength (240 kgf/cm2) and low dimension loss (2–6%). For comparison, this work also demonstrates that the normal stress of this technology is 2–15 times greater than that of other bonding technologies, including hot embossing, anodic bonding, direct bonding and thermal fusion bonding.

Applying Taguchi methods for solvent-assisted PMMA bonding technique for static and dynamic μ-TAS devices

Despite significant efforts to develop micropumps, cumbersome driving equipment means that the design of portable micropumps remains a challenge. This study presents a stand-alone micropump system, which includes a peristaltic micropump based on piezoelectric actuation and a driving circuit. This battery-based driving circuit comprises a 12 V battery, an ATmega 8535 microprocessor, a 12 V-to-180 V DC to DC converter using transformerless technology, three differential amplifiers, an IC 7805, a phase controller, an A/D converter, a keyboard and an LCD module. The system can produce step-function signals with voltages of up to 228 Vpp and frequencies ranging from 10 Hz to 100 kHz, as the inputs for the pump. It is portable and programmable with the package size of 22 × 12.8 × 9 cm. Additionally, this proposed system is used to design the driving signals of the pump which are 3-, 4, and 6-phase actuation sequences. This work performs the circuit testing and fluid pumping, and demonstrates the effects of actuation sequences on pump performance in terms of the dynamic behavior of the diaphragm, flow rates, back pressure and power consumption of the system. The experimental results show that the pump excited by the 6-phase sequence results in better performance compared with the 3- and 4-phase sequences, and produces a maximum flow rate of 36.8 μl/min and a maximum back pressure of 520 Pa with deionized water at 100 V pp and 700 Hz.

A stand-alone peristaltic micropump based on piezoelectric actuation

Recent development of next-generation medical devices, such as endoscopes and hearing aids, call for PZT (lead zirconate titanate oxide) thin-film sensors and actuators with thickness in the range of 1–30 μm to enhance actuation strength and sensor sensitivity. Currently, sol–gel derived PZT films often have thickness less than 0.2 μm per coating. Moreover, thermal stresses in the films limit the crack-free area to less than 1 mm2. This paper has four specific goals. The first goal is to demonstrate an improved sol–gel process using rapid thermal annealing and a diluted sealant coating. The resulting thickness can reach 2 μm in three coatings with a crack-free area as large as 5 mm ×5 mm . The second goal is to characterize piezoelectric properties of the fabricated PZT films experimentally. The resulting piezoelectric constant d33 is 120 pC/N and the dielectric constant ranges from 200 to 400. The third goal is to demonstrate the use of the PZT thin film as a calibrated sensor. The specimen is a silicon cantilever ( 30 mm ×7.5 mm ×0.4 mm ) with a PZT thin film ( 4 mm ×4 mm ×1 μm ). Moreover, a tiny shaker excites the cantilever at the fixed end, and a charge amplifier detects the charge accumulated in the PZT film. In the meantime, a laser vibrometer measures the deflection of the cantilever at three points along the PZT film, from which the strain is calculated using Euler–Bernoulli beam theory. Comparison of the strain and the charge amplifier voltage determines the calibration constant of the PZT thin-film sensor. The last goal is to demonstrate the use of the PZT thin film as a powerful actuator through active vibration control. In experiments, a tiny bulk PZT patch is first glued to the silicon cantilever. A function generator drives the bulk PZT simulating a source of disturbance exciting the silicon cantilever. In the meantime, a laser Doppler vibrometer (LDV) measures velocity of the cantilever tip. With a phase shifter as the controller, the LDV measurement is fed back to the PZT thin-film actuator to actively control the cantilever vibration. To evaluate the effectiveness of the active vibration control, a spectrum analyzer measures the frequency response functions (FRF) from the bulk PZT voltage to the LDV response. Experimental results show that the simple active vibration control scheme can reduce resonance amplitude of the first bending mode by 66%.

https://depts.washington.edu/solgel/documents/pub_docs/journal_docs/2004/35.pdf

Demonstration and characterization of PZT thin-film sensors and actuators for meso- and micro-structures

This study involves the design, fabrication and characterization of a biocompatible silicon micropump. Three experiments were conducted to study the performance of this pump in clinical environments. They were a blood compatibility test, and in vitro and ex vivo studies. Whole blood is an intrinsically complex material and difficult to manipulate using a microsystem device. In the blood compatibility experiments, two materials N-(triethosilylpropyl)-O-polyethylene oxide urethane (PEOU) and polyethylene glycol (PEG) were employed to form a self-assembled monolayer (SAM) on a chip surface. According to the platelet remaining test and a 30-min blood transportation test, PEOU protected the micropump from thrombus. In the second experiment, the micropump handled several liquids, including DI water and whole blood. When the pump was operated at a voltage of 140 Vpp, the flow rates of the DI water and whole blood were 121.6 μl/min at 500 Hz and 50.2 μl/min at 450 Hz, respectively. The maximum back pressure of the water and the blood in the micropump were 3.2 and 1.8 kPa, respectively. Finally, the micropump injected phosphated buffered saline (PBS) and whole blood into the veins of rats. The pump was characterized ex vivo and discussed. The third experiment reveals that the micropump fulfilled the dosing condition for clinical medicine and did not affect the physiological function of the rats. This pump is highly promising for biomedical applications, such as in drug delivery for patients, or in clinical care. Moreover, the pump has potentials to control precisely medication to improve conventional clinical treatments.

Development of peristaltic antithrombogenic micropumps for in vitro and ex vivo blood transportation tests

Utilizing an electronic–hydraulic analogy, this study develops an equivalent electrical network of a piezoelectric peristaltic micropump which has not been modeled the whole system operation completely by computational fluid dynamics (CFD) or equivalent electrical network so far due to its excessive complicated structure. The validity of the proposed model is verified by comparing the simulation results obtained using the SPICE (simulation program with integrated circuit emphasis) software package for flow rate spectrum and its maximum state of a typical micropump with the experimental observations for two working fluids, namely DI water and blood. The simulation results predict a maximum flow rate frequency and flow rate of 280 Hz and 43.23 μL/min, respectively, for water, and 210 Hz and 24.12 μL/min for blood. The corresponding experimental results are found to be 300 Hz and 41.58 μL/min for water and 250 Hz and 23.75 μL/min for blood. The relatively poorer agreement between the two sets of results when using blood as the working fluid is thought to be the result of the non-Newtonian nature of blood, which induces a more complex, non-linear flow behavior within the micropump. Having validated the proposed model, the equivalent network is used to perform a systematic analysis of the correlation between the principal micropump design parameters and operating conditions and the micropump performance. The results confirm the validity of the equivalent electrical network model as the first microfluidic modeling tool for optimizing the design of peristaltic micropumps and for predicting their performance.

Yi-Chu Hsu

Papers

Applying Taguchi methods for solvent-assisted PMMA bonding technique for static and dynamic μ-TAS devices

A stand-alone peristaltic micropump based on piezoelectric actuation

Demonstration and characterization of PZT thin-film sensors and actuators for meso- and micro-structures

Development of peristaltic antithrombogenic micropumps for in vitro and ex vivo blood transportation tests

Equivalent electrical network for performance characterization of piezoelectric peristaltic micropump