A method and apparatus for etching photomasks is provided herein. In one embodiment, the apparatus comprises a process chamber having a support pedestal adapted for receiving a photomask. An ion-neutral shield is disposed above the pedestal and a deflector plate assembly is provided above the ion-neutral shield. The deflector plate assembly defines a gas flow direction for process gases towards the ion-neutral shield, while the ion-neutral shield is used to establish a desired distribution of ion and neutral species in a plasma for etching the photomask.

Method and apparatus for photomask plasma etching

Summary of Chapter 2 The three-dimensional transport in solar cells with periodically arranged rear point contacts wassuccessfully reduced to a one-dimensional calculation. A new analytical formulation attributes aneffective surface recombination velocity S eff to the inhomogeneous rear surface. It is based on arelationship between the effective diffusion length and the series resistance in the base that be-came obvious after rigorously decoupling the transport problem. An approximation for this seriesresistance was derived which, for the first time, remains valid in every asymptote of the involvedparameters. Scaling laws helped to reduce the number of these parameters to only two; the cover-age fraction f and the period to cell thickness ratio l P . The final equation for the effective SRVreads fsf l f l f sls passP P metPeff −++−= − 11 1exp2arctan2 1 ππ,with s i = S i W / D , the SRV at the contacts S met and between the contacts S pass . The results are in goodagreement with three-dimensional simulations using a numerical Fourier-transform technique.A new method was found to discuss the effects of carrier lifetime variations in multicrystal-line solar cells without the need to assume a particular lifetime distribution. It consists in rules,expressed as a number

Loss analysis of crystalline silicon solar cells using photoconductance and quantum efficiency measurements

Solar cells each include: an insulator connected to a back surface of a photoelectric conversion part; a first through-hole electrode penetrating the insulator, and electrically connected to a first collector electrode; and a second through-hole electrode penetrating the insulator, and electrically connected to a second collector electrode. In addition, a wiring member is disposed on the insulator.

Solar cell and solar cell module

A solar cell module includes: two solar cells, each including an photoelectric conversion body 10a, 10b having first and second main faces and generating photogenerated carriers, a first electrode provided on the first main face, and a second electrode provided on the first or second main face and having a polarity opposite to that of the first electrode; and a wiring member 2a for electrically connecting the first electrode of one of the two solar cells to the second electrode of the other solar cell. The first electrode has a plurality of finger electrodes for collecting the photogenerated carriers generated in the photoelectric conversion body 10a and a bus-bar electrode 11a for collecting the photogenerated carriers collected by the plurality of finger electrodes. The wiring member 2a is connected onto the bus-bar electrode 11a of the one solar cell through a connection layer 13 formed of a conductive resin containing conductive material. The connection layer 13 is also in contact with the first main face of the photoelectric conversion body 10a.

Solar cell module

A method and apparatus for etching a substrate using a spatially modified plasma is provided herein. In one embodiment, the method includes providing a process chamber having a plasma stabilizer disposed above a substrate support pedestal. A substrate is placed upon the pedestal. A process gas is introduced into the process chamber and a plasma is formed from the process gas. The substrate is etched with a plasma having an ion density to radical density ratio defined by the plasma stabilizer.

Method and apparatus for stable plasma processing

A surface electrode (5) is installed on the light receiving surface of a solar cell element, the surface electrode (5) comprises three bus bar electrodes (5a) for retrieving light-produced current produced at the solar cell element to the outside and collecting finger electrodes (5b) connected to these bus bar electrodes (5a), and the bus bar electrodes (5a) are 0.5 mm through 2 mm in width and the finger electrodes (5b) are 0.05 mm through 0.1 mm in width. A high-efficient solar cell module can be obtained with substantially lowered resistance by increasing the number of bus bar electrodes (5a) and thereby decreasing the lengths of the finger electrodes (5b).

Solar Cell Module and Photovoltaic Power Generator Using This

There is presented a solar cell comprising a semiconductor substrate of one conductivity-type, a layer of the opposite conductivity-type provided on a surface side of the semiconductor substrate, a surface electrode formed thereon, and a backside electrode formed on a backside of the semiconductor substrate, wherein the semiconductor substrate is formed with protrusions and recesses on the surface side thereof, and spaces that are filled with a glass component of an electrode material of the surface electrode are present in bottom portions of the recesses. This arrangement has eliminated a conventional problem in that silver in the electrode material gets into the bottom portions of the recesses and causes defects to be generated in the recesses due to stress generated during forming of the electrode.

Solar cell, manufacturing method thereof and electrode material

A solar battery module, comprising a front surface member (1) having permeability, a rear surface member (5), an intermediate member (7) formed of an insulator disposed between the front surface member (1) and the rear surface member (5), a first solar battery element group (8a) disposed between the front surface member (1) and the intermediate member (7) with its light receiving surface facing the front surface member (1), and a second solar battery element group (8b) disposed between the rear surface member (5) and the intermediate member (7) with its light receiving surface facing the rear surface member (5). Accordingly, light incident on both surfaces can be effectively utilized for power generation by a simple structure. The solar battery module thus provided can increase a power generating efficiency per unit area, is less affected by the surrounding adverse environment, and is adapted to the environment in which the module is installed.

Solar battery module and photovoltaic generation device

PROBLEM TO BE SOLVED: To provide a solar cell module and solar cell array which can prevent a frame member from coming off a seal without using the frame member having a large cross-sectional area SOLUTION: In the solar cell module comprising frame members 2 mounted on the periphery of the solar cell module body 1 which has a plurality of solar battery cells arranged at the backside of a translucent panel, a reinforcing member 3 is spanned between the opposed frame members 2 at the backside of the solar cell module body 1, and a buffer material 4 is interposed between the reinforcing member 3 and the solar cell module body 1 COPYRIGHT: (C)2004,JPO

Solar cell module and solar cell array

PROBLEM TO BE SOLVED: To provide a highly efficient solar battery element having a simple constitution. SOLUTION: The solar battery element 20 has a semiconductor substrate 1 as a first conductivity type, a first opposite-conductivity-type layer 2 formed on one principal surface of the semiconductor substrate 1, as the opposite-conductivity type to the conductivity type of the substrate 1; a plurality of through-holes 3 each of which ranges from the one principal surface of the semiconductor substrate 1 to the other principal surface thereof, and each of whose inner walls is coated with a second opposite-conductivity-type layer 6 or a first insulating-material layer 6; each first electrode 4 so formed as to range from the one-principal-surface side to the other-principal-surface side via each through-hole 3, and connected with the first opposite-conductivity-type layer 2; each second electrode 5 formed on the other principal surface and having the different polarity from the polarity of each first electrode 4; and each second insulating-material layer 7 interposed between the other-principal-surface side and each first electrode 4. COPYRIGHT: (C)2008,JPO&INPIT

Yuko Fukawa

Papers

Solar Cell Module and Photovoltaic Power Generator Using This

Solar cell, manufacturing method thereof and electrode material

Solar battery module and photovoltaic generation device

Solar cell module and solar cell array

Solar battery element, solar battery module using same, and manufacturing methods of both