Z
Z. Lisa Zhang
Researcher at Cornell University
Publications - 9
Citations - 961
Z. Lisa Zhang is an academic researcher from Cornell University. The author has contributed to research in topics: Etching (microfabrication) & Reactive-ion etching. The author has an hindex of 9, co-authored 9 publications receiving 957 citations.
Papers
More filters
Journal ArticleDOI
SCREAM I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures
TL;DR: In this paper, a single-crystal slhcon, high aspect ratlo, low-temperature process sequence for the fabelfcatlon of suspended movable smgle-crystals s&on (SCS) beam structures is presented.
Patent
Microstructures and single mask, single-crystal process for fabrication thereof
TL;DR: In this paper, a single mask, low temperature reactive ion etching process for fabricating high aspect ratio, released single crystal microelectromechanical structures independent of crystal orientation is described.
Patent
Compound stage MEM actuator suspended for multidimensional motion
Z. Lisa Zhang,Noel C. MacDonald +1 more
TL;DR: In this paper, a microelectromechanical compound stage microactuator assembly capable of motion along x, y, and z axes for positioning and scanning integrated electromechanical sensors and actuators is fabricated from submicron suspended single crystal silicon beams.
Patent
Microstructures and high temperature isolation process for fabrication thereof
TL;DR: In this paper, a method of fabricating released microelectromechanical and microoptomechanical structures having electrically isolating segments from single crystal silicon includes thermal oxidation steps.
Patent
Electrically isolated released microstructures
TL;DR: In this paper, a single mask, low temperature reactive ion etching process for fabricating high aspect ratio, released single crystal microelectromechanical structures independently of crystal orientation.