Showing papers in "Center for Embedded Network Sensing in 1998"

A Low Power MEMS Silicone/Parylene Valve

Abstract: A low power thermopneumatic MEMS valve utilizing several novel components has been developed. 61 mW of power is sufficient to control a nitrogen flow of 1.1 lpm with an inlet pressure of 24 psi. Previous work [1,3] has shown that silicone rubber has a low Young’s modulus (~1 MPa) and exhibits good sealing properties. Thermopneumatic actuation [1,2] has the potential for large forces through long displ acements. By using a “soft” membrane with a large gap, and thermopneumatic actuation, high flow rates are achievable while still keeping power consumption low. However, silicone has been shown to be permeable to a wide range of liquids including FluorinertTM which necessitates the addition of a barrier layer, in this case Parylene C. This paper presents a low power valve constructed with a composite silicone/Parylene membrane, a suspended heater for low heat loss through conduction, and a valve seat designed for improved sealing and particle resistance.