Showing papers in "Vacuum in 1970"

TL;DR: In this paper, an examination has been made of the pre-breakdown conduction between stainless steel, copper, aluminium and tungsten electrodes at small gaps (less than 1 cm) and in poor (3 x 109 torr, baked) vacuum systems.

TL;DR: The radial flow of a gas in which transition from viscous to slip to free molecule flow occurs is studied theoretically and experimentally as discussed by the authors, and the results indicate the effective separation to be slightly less than the sum of the measured flatness deviations of each disk.

TL;DR: In this article, a review of the literature in the area of plasma and ion beam systems is presented, with a focus on low pressure plasma systems for surface cleaning and thin film sputtering which localise ionization and prevent interaction with the pumps.

TL;DR: In this article, a room-temperature calibration system is described in which calibrating pressures between 10P −9 and 10 −5 torr are maintained by a helium evaporator cryopump with a liquid helium consumption of 2-3 litres/hour.

TL;DR: In this paper, the authors present evidence for the existence of crystalline SiO, showing that thin-film SiO deposited rapidly appear to have un absorption peak in the infra-red at about 10 μ.

TL;DR: In this article, the authors describe a series of experiments designed to assist in determining the extent to which the room temperature outgassing rate of stainless steel can be reduced by cleaning processes only without recourse to vacuum bakeout.

TL;DR: In this paper, an equation for calculating the specific leak rate of vacuum ga sket seals is derived by using the concepts developed in Sealography, which is found to be in good agreement with experimental data published by various authors.

TL;DR: In this article, a six-inch radius 60° sector field mass spectrometer was used to determine the spectra of three types of oil commonly used in ultrahigh vacuum diffusion pumps.

TL;DR: In this paper, the outgassing rates of 80 untreated refractory and electrical insulating materials were evaluated in the pressure range 10 −3 to 10 −7 torr at room temperature.

TL;DR: Mcllraith as discussed by the authors described an electrostatic charged particle oscillator which consisted essentially of a cylindrical cathode surrounding two anode wires symmetrically disposed about the axis of the cylinder.

TL;DR: In this article, the mercury vapour drag effect was experimentally studied to verify the kinetic theory of the effect developed by one of the present authors, and the measurements were carried out with a new technique in which radioactive 133 Xe was used as a tracer in the pressure region 10 −8 ~10 −2 torr.

TL;DR: In this article, a radial electrostatic field thermionic ionisation gauge using a simple method of electron injection was described, with a sensitivity greater than 10 5 torr −1 with stable ion current characteristics.

TL;DR: In this article, the stability of Penning pumps to rare gases was studied and it was shown that the ratio of the mass of the cathode atom to the mass impinging rare gas ion is directly related to the presence of cyclic instabilities.

TL;DR: In this paper, the problems encountered while attempting to measure pre-breakdown currents are enumerated and remedial measures are suggested by the authors, and the problems are discussed in detail.

TL;DR: In this paper, a modulated Bayard-Alpert gauge is used in the Redhead 1 mode and three phenomena occur which may introduce errors into a pressure measurement: (i) the modulation factor may vary with gas and emission; (ii) pressure changes may occur in the system; (iii) residual current may be modulated.

TL;DR: In this paper, it was shown that similar changes in the gas mixture may occur if only mutual reactions of the adsorbed gas species at the given temperature are allowed, where the surfaces themselves need not be included in the chemical reactions that take place.

TL;DR: The principles of operation of the most commonly encountered thin film monitors are described and a performance survey is given for a selection of commercial instruments in this article, where the authors also present a performance analysis of a number of commercial thin-film monitors.

TL;DR: In this paper, the principles of operation of the most commonly available commercial vacuum mass spectrometers are described and a performance survey is given for a selection of commercial instruments for particular applications.

TL;DR: In this paper, the ion current between specific electrodes is measured in terms of the ion currents between the electrodes to estimate the partial pressure of the gas molecules in order to identify the various gas constituents and determine their partial pressures.

TL;DR: In this paper, a simple additive Monte Carlo method is presented by means of which further data may be derived from only a few known values, and it is shown that the new method affords a considerable increase in accuracy with deviations not usually exceeding the error in the starting data.

TL;DR: In this article, the authors decrit un appareil permettant de transformer l'extremite d'un fil (tungstene) dans le vide en une pointe fine par bombardement electronique.

TL;DR: In this paper, a simple 180°, miniature magnetic mass spectrometer was used to improve vacuum techniques on rotary pump, diffusion pump and ion pump systems operating from 10−3 torr to UHV.

TL;DR: In this article, a performance survey is given for a selection of commercial instruments for measuring the thickness of thin thin films, and a performance analysis is provided for a variety of commercial tools.

TL;DR: In this article, a quartz crystal microbalance operating at temperatures close to −130 °C has been used for measuring multichannel atomic beams of mercury, cadmium and zinc, whose intensities were about 10 15 at/cm 2.sec.

TL;DR: In this article, a dynamic pressure reduction system is described which allows absolute calibration in the pressure range 1 Nm−2 (~10−2 torr) to 10−6 Nm −2 (~70−5 torr).