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Showing papers in "Vacuum in 1979"


Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this article, the electron and ion induced neutral gas desorption coefficients at 1.4 keV have been measured for stainless steel, Inconel 600, INconel 718, a titanium alloy, OFHC copper and an aluminium alloy after bakeout at temperatures ranging from 150 to 600°C.

58 citations


Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this paper, it was shown that if the gas is absorbed without dissociation and the gas temperature is equal to that of the membrane, only an infinitesimal part of the incident gas flow can penetrate through the membrane.

56 citations


Journal ArticleDOI
H Norström1
01 Jan 1979-Vacuum
TL;DR: Experimental and design information for calculating impedance matching networks for use in RF sputtering and plasma chemistry can be found in this article, where the authors present a detailed description of the impedance matching network.

33 citations


Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this article, two variants of pump construction are described capable of hydrogen evacuation followed by purification, compression and recuperation if required, and the operation of these pumps are studied under different conditions.

32 citations


Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this article, the authors used Rutherford backscattering to show that contamination levels can be in excess of 1 and 0.02% of the implanted dose for forward and back sputtering, respectively, and suggested that ion implantation equipment using mechanical sample scanning is particularly susceptible to this cause of contamination.

25 citations


Journal ArticleDOI
GF Weston1
01 Aug 1979-Vacuum

20 citations


Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this paper, the SIE mechanism during Ta, Nb and Mo sputtering is determined by the electron exchange between a sputtered atom and a metal, and independent of the primary ion energy.

15 citations


Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this article, it was shown that the power input of a diffusion pump charged with perfluoro polyether (PFPE) can be greatly reduced without unduly affecting the performance and by careful choice of power and fluid charge vibrations from the boiling fluid can be kept to a minimum.

13 citations


Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: A review of reported research on the calibration of vacuum gauges by the static method is presented in this article, where the techniques of single or multiple gas expansion are discussed and the sources of uncertainty to the method are analyzed.

13 citations


Journal ArticleDOI
01 Aug 1979-Vacuum

12 citations


Journal ArticleDOI
Cristoforo Benvenuti1, M Firth1
01 Jan 1979-Vacuum
TL;DR: The condensation cryopumps developed at CERN and described previously have been modified to provide longer operating times between liquid He fillings by protecting the lateral and top surfaces of the He vessel with a shield cooled by the evaporated helium.

Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this paper, a new method of treating LEED data, comparing relative intensities of diffraction beams at individual energies is described and its sensitivity to structural and non-structural parameters demonstrated.

Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this paper, the work function of the lanthanum hexaboride (LaB6) layer evaporated on a tantalum ribbon surface was measured as a function of evaporation time, using thermionic diode and electron beam methods.

Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: Indium and aluminum are used as soft-metal pressure sealants for glass-to-glass and glass to-ceramic interfaces and, in addition, between a wide range of dissimilar materials having unlike thermal coefficients of expansion as mentioned in this paper.

Journal ArticleDOI
01 Aug 1979-Vacuum
TL;DR: In this paper, the inherent difficulties in interpreting thermal desorption spectra are discussed and possible mechanisms which can change the expected form of the evolution spectra including the possibility of a distribution of activation energies for release of trapped gas and the spatial distribution of the trapped gas.


Journal ArticleDOI
RK Fitch1, S Venkatesh1
01 Jan 1979-Vacuum
TL;DR: In this paper, a comparison between the McClure and McIlraith electrostatic ion sources has been made in terms of the relevant published literature and experimental work conducted in this laboratory.

Journal ArticleDOI
H Norström1
01 Jan 1979-Vacuum
TL;DR: In this paper, a Langmuir probe study of the discharge condition in a typical rf sputtering system operating at various frequencies was made, and it was observed that the plasma potential is related to the frequency, tending to more positive values at lower frequencies.

Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this paper, it is suggested that this morphology results from an underlying periodicity of the fiber structure either inherent in the fibre structure or induced by the irradiation, and that ripple structures with a habit transverse to the fibre axes and of wavelength of approximately 1000 A are gradually developed during ion bombardment.

Journal ArticleDOI
M Borghi1, L Rosai1
01 Jan 1979-Vacuum
TL;DR: In this paper, a number of experimental metal halide lamps (400 W) were produced using the St 101 getter alloy (84% Zr-16% Al) and an analysis of the jacket atmosphere and the getter gave information about the impurity load and the gas release dynamics.

Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this paper, the effect of implantation of various species into copper on the secondary Cu+ ion signal was investigated and it was shown that both a physical change in the sample induced by the implantation and a chemical effect due to the presence of the implant species are responsible for the observed changes.

Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this paper, a metallic A1-type iodine modification exhibiting soft superconductivity was quenchdeposited on CaO or SrO. The normal resistivity, superconducting transition temperature and critical magnetic field decrease with increasing thickness.


Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this article, the effects on the sensitivity of hot-cathode ionization gauges of varying the temperature of the gauge envelope were investigated using a compact bakeable ultra-high vacuum system.

Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this paper, the activation energies for desorption were obtained for atomic deuterium on pyrocarbon, silicon carbide and boron carbide with a linear heating schedule.



Journal ArticleDOI
01 Jan 1979-Vacuum
TL;DR: In this paper, the critical magnetic field of a superconducting metastable A1-type As, Sb and Bi modification obtained in the form of thin films by vapour-quenching on glass substrates quench-coated with LiF or MgO, MnO or CaO and NaF or SrO, respectively.

Journal ArticleDOI
01 Aug 1979-Vacuum
TL;DR: In the production of vacuum, the contributions by the great genius, Gaede are acknowledged (1978 was the centenary year of his birth); the claims are considered to produce clean ultra-high vacua by the protagonists of (a) the most recent oil diffusion pump systems and (b) the turbomolecular pumps as discussed by the authors.