Figure 3. Room temperature values of sheet resistance (●) and acceptor ionization energy (©) of the samples of this study after post implantation annealing at 1950◦C (see text) and different annealing times. Dashed straight lines interpolates the decreasing and the saturated data (see text). The cross point between these two trends is 12 min and 22 min for sheet resistance (●) and acceptor ionization energy (©), respectively.
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