Open AccessDissertation
A feedback loop design for MEMS resonant accelerometer using a describing function technique
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The article was published on 2003-01-01 and is currently open access. It has received 8 citations till now. The article focuses on the topics: Describing function & Feedback loop.read more
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Journal Article
Resonant Loop Design and Performance Test for a Torsional MEMS Accelerometer with Differential Pickoff
TL;DR: In this article, the authors presented an INS grade, surface micro-machined differential resonant accelerometer (DRXL) manufactured by an epitaxially grown thick polysilicon process, which generates a differential digital output upon an applied acceleration, in which frequency transition is measured due to gap dependent electrical stiffness change.
Proceedings ArticleDOI
Precise Oscillation Loop for a Resonant Type MEMS Inertial Sensors
TL;DR: In this paper, a self-sustained oscillation loop for an inertial navigation system (INS) grade, surface micro-machined differential resonant accelerometer and in-plane vibratory gyroscope is presented.
Proceedings ArticleDOI
Design and performance analysis of PLL based self oscillation loop in vibrating gyroscope
TL;DR: In this paper, a self oscillation loop in vibrating gyroscope based on the phase locked loop (PLL) was proposed and a phase error in the PLL was analyzed.
Journal ArticleDOI
Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance under Noisy Condition
TL;DR: In this article, an oscillation loop for an inertial navigation system grade, surface micro-machined resonant type accelerometer was designed and the feature of the loop was analyzed in the viewpoint of nonlinear dynamic system.
Proceedings ArticleDOI
Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance
TL;DR: In this paper, a self-sustained oscillation loop for an INS (Inertial Navigation System) grade, surface micro-machined differential resonant accelerometer was designed and analyzed in the viewpoint of nonlinear dynamic system.