Patent
Capacitive mask aligner
TLDR
In this paper, an aligner for aligning a mask and a wafer during photolithography of a semiconductor chip uses detection of the differential capacitance between two sets of conductive fingers on the mask and ridges on the wafer.Abstract:
An aligner for aligning a mask and a wafer during photolithography of a semiconductor chip uses detection of the differential capacitance between two sets of conductive fingers on the mask and ridges on the wafer. An A.C. signal is coupled between the ridges and the fingers and the phase or amplitude of the signals is detected. An aligner utilizing multiple groups of ridges and fingers allows rotational alignment or two axis lateral alignment. An aligner having reference ledges to which the mask and the wafer are capacitively coupled allows alignment when the distance between the mask and the wafer is too great to permit meaningful capacitive coupling between the mask and the wafer to occur.read more
Citations
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Patent
Capacitance-type measuring device for absolute measurement of positions
TL;DR: In this paper, an array of capacitive-type measuring apparatus for absolute position measurements comprises first and second support members which are relatively displaceable with respect to a measurement axis, and a second receiver electrode arrangement disposed on the first support member for sensing the voltage distribution of the electric field created by the second transmitter electrode array with N excitation signals.
Patent
Method and apparatus for non-conductively interconnecting integrated circuits
TL;DR: In this paper, a method and apparatus for constructing, repairing and operating modular electronic systems utilize peripheral half-capacitors (i.e., conductive plates on the outside of the modules) to communicate non-conductively between abutting modules.
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Capacitive type measurement transducer with improved electrode arrangement
TL;DR: In this article, a capacitive type measuring apparatus comprises first and second electrode arrays mounted on first-and second support members which are relatively displaceable with respect to each other.
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Capacitive incremental position measurement and motion control
TL;DR: In this paper, a capacitance-based high-resolution, incrementally encoding, position measuring system employs an array of identical replicated electrodes that are driven in unison from an RF source and mounted in proximity to a patterned monolithic reference ground plane of arbitrary size.
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Position encoder system
TL;DR: In this article, the position encoder system requires no keyboard surface area and includes a retractable and extendable handle that is stored inside the computer when not in use, and the handle is extended for use near the computer keyboard.
References
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Patent
Soft x-ray mask alignment system
Henry I. Smith,D Spears,E Stern +2 more
TL;DR: An alignment system for a soft X-ray lithographic system for aligning a mask with a substrate to be printed with a pattern including a first registration means on the mask and second registration on the substrate is described in this article.
Patent
Differential capacitive position encoder
TL;DR: In this paper, circuits and structures are arranged to serve as encoders, emitters, or switches by capacitive coupling, and they are arranged in a grid-like fashion.
Patent
Shaft position sensing device
TL;DR: In this paper, a differential variable capacitor is mounted on a ring demodulator to change capacitance with shaft rotation, which is used to detect shaft position and provide a non-velocity sensitive low-noise output signal.
Patent
Capacitance displacement transducers
TL;DR: In this paper, the rotary type of transducer is represented by a pair of members in the form of discs, one of which is fixed and the other rotated by a shaft.
Patent
A capacitive transducer for sensing a home position
TL;DR: In this paper, a rotational shaft home position sensing transducer is provided which comprises a rotor (11) mounted on the shaft (10) having a planar surface with a first radial array of conductive elements (16) on the surface in combination with a fixedly mounted stator (12), having a parallel to the planar rotor surface and a second corresponding radial array on the stator surface adjacent and spaced from the first array.