Patent
High-resolution roll angle measuring method and device based on heterodyne interferometric phase method
TLDR
In this paper, a high-resolution roll angle measuring method and device based on a heterodyne interferometric phase method was presented, which consisted of a transverse Zeeman double-frequency laser and a beam splitter prism in an emergent light path of the transverse zeeman double frequency laser, and a first polarization analyzer and a second photoelectric receiver were arranged in a reflection light path, and the output end of the phase meter was connected with an industrial personal computer.Abstract:
The invention discloses a high-resolution roll angle measuring method and device based on a heterodyne interferometric phase method The device comprises a transverse Zeeman double-frequency laser and a beam splitter prism in an emergent light path of the transverse Zeeman double-frequency laser, and a first polarization analyzer and a first photoelectric receiver are arranged in a reflection light path of the beam splitter prism A half-wave plate is arranged in a transmission light path of the beam splitter prism and is located in the middle of a plane mirror array, a phase delay sheet and a right-angle reflecting prism are arranged in a final emergent light path of the half-wave plate, and a second polarization analyzer and a second photoelectric receiver are arranged in a reflection light path of the right-angle reflecting prism The first photoelectric receiver and the second photoelectric receiver are connected with a phase meter, and the output end of the phase meter is connected with an industrial personal computer The superposition performance of acting on the polarized light is utilized when the half-wave plate and the plane mirror array are matched to be used, the half-wave plate is mounted in the plane mirror array and is used in common with the phase delay sheet, and roll angle measuring resolution is further improvedread more
Citations
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Patent
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References
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Patent
Oblique incidence interferometer
TL;DR: An oblique incidence interferometer as mentioned in this paper is configured to measure a shape of measurement objective surface S by irradiating the objective surface with coherent light in an oblique direction to interfere with a reference beam, including a light source configured to emit the coherent light.
Patent
Tumble angle measuring method and measurer
TL;DR: In this paper, the authors presented an optical angle measuring technology that includes setting half-reflecting mirror in the output light axis of Zeeman laser, setting half wave plate perpendicularly in the transmission light path of the half reflecting mirror, and setting analyzer, one first photoelectronic detector successively and a perpendicular second detector in the reflection light path; and one phase meter with input connected to the output of the first and the second photoelectronics detectors and output to the computer.
Patent
Phase shifting lateral direction shearing interferometer
TL;DR: A phase shift transverse shear interferometer is an equal optical path interference optical system, the shear quantity can be continuously adjusted, which is very applicable to the wavefront measurement of the short interference length as mentioned in this paper.
Patent
Measurement method of small angle and small displacement and the device thereof
TL;DR: In this paper, a measurement method of small angle and small displacement and its device is described, which consists of a light source, a beam splitter, a displacement detector, an optical lens, a prism, an analyzer, a light detector and a computer.