Patent
Higher power density downstream plasma
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TLDR
In this article, a method and system to obtain a high power density plasma to efficiently generate high concentrations of plasma downstream from one or more plasma sources is presented, where a constriction in a discharge chamber is used to dissociate gases to create plasma.Abstract:
A method and system to obtain a high power density plasma to efficiently generate high concentrations of plasma downstream from one or more plasma sources. A first embodiment of the invention involves a method to provide an improved power density for dissociating one or more gases to create plasma. A second embodiment of the invention involves a method to provide multiple chambers for dissociating one or more gases to create plasma. A third embodiment involves an apparatus using a constriction in a discharge chamber containing one or more gases, to provide an improved power density for dissociating one or more gases to create plasma. A fourth embodiment involves an apparatus using a constriction in multiple discharge chambers containing one or more gases, to provide an improved power density for dissociating one or more gases to create plasma.read more
Citations
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References
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Methods and apparatus for generating a plasma for "downstream" rapid shaping of surfaces of substrates and films
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