Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon

TLDR: The Electron System Phenomenological and Atomistic Approaches to Diffusion Thermodynamics Reaction Kinetics Exchange of Matter Between Phases Bibliography Intrinsic Point Defects Concentration in Thermal Equilibrium Diffusion of Intrininsic Points Defect, Self-Diffusion and Tracer Diffusion Vacancies Self-Interstitials Frenkel Pairs Bulk Recombination and Bulk Processes Surface Recombinations and Surface Processes Initial Conditions Bibliography Impurity Diffusion in Silicon Basic Mechanisms Impurity-Point-Defect Pairs Diffusion via Mobile

Abstract: Preface / Frequently Used Symbols / Explanation of Frequently Used Abbreviations Fundamental Concepts Silicon and Its Imperfections The Electron System Phenomenological and Atomistic Approaches to Diffusion Thermodynamics Reaction Kinetics Exchange of Matter Between Phases Bibliography Intrinsic Point Defects Concentration in Thermal Equilibrium Diffusion of Intrinsic Point Defects Self-Diffusion and Tracer Diffusion Vacancies Self-Interstitials Frenkel Pairs Bulk Recombination and Bulk Processes Surface Recombination and Surface Processes Initial Conditions Bibliography Impurity Diffusion in Silicon Basic Mechanisms Impurity-Point-Defect Pairs Diffusion of Substitutional Impurities via Mobile Complexes with Intrinsic Point Defects Pair-Diffusion Models Frank-Turnbull Mechanism Kick-Out Mechanism Bibliography Isovalent Impurities Carbon Germanium Tin Bibliography Dopants Dopant Clusters Ion Pairing Boron Aluminum Gallium Indium Nitrogen Phosphorus Arsenic Antimony Bibliography Chalcogens Oxygen Sulfur Selenium Tellurium Bibliography Halogens Fluorine Chlorine Bromine Bibliography List of Tables / List of Figures / Index