Patent
Method and apparatus for positioning a disk-shaped object
Hideo Haraguchi,Matsuda Izuru +1 more
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TLDR
In this article, a support member for positioning is extended to the outside through an opening of a vacuum vessel and a bellows connected to the circumference of the opening with a play such that positioning movement can be performed without being in contact with the opening and the bellows.Abstract:
Objects of the present invention are to prolong the life of a sealing portion by using bellows and to prevent the generation of dust and the effect thereof. A support member for positioning is extended to the outside through an opening of a vacuum vessel and bellows connected to the circumference of the opening with a play such that positioning movement can be performed without being in contact with the opening and the bellows, and the support member is received by roller bearings in a bulkhead portion connected to a free end of the bellows and closing the bellows of a bearing support. Necessary rotation is given to the support member from outside via inside and outside magnetic couplings facing each other on the inside and outside of the bulkhead portion, and movement in the X direction perpendicular to the axis is given to the support member from outside by moving the bearing support in the direction perpendicular to the axis with respect to the vacuum vessel. Thereby, a disk-shaped object is positioned without necessitating a sliding portion located in the vacuum vessel, thereby achieving the above objects.read more
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