Patent
Method and device for lithography
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TLDR
In this paper, a volatile organic solvent in which a water repellent matter is dissolved is sprayed on a plate for lithography wherein a hydrophilic treatment is applied on the surface thereof by an ink jet method according to an image information.Abstract:
PURPOSE:To enhance an operating efficiency in process of lithography, by spraying a water repellent liquid on the hydrophilic surface of a plate. CONSTITUTION:A volatile organic solvent in which a water repellent matter is dissolved is sprayed on a plate for lithography wherein a hydrophilic treatment is applied on the surface thereof by an ink jet method according to an image information. At this time, quick volatilization of the organic solvent allows the water repellent matter to adhere only on the water repellent matter sprayed portion of the water hydrophilic surface of the plate for lithography. In this manner, an image portion having a lipophilic surface and a non-image portion having a hydrophilic surface can be formed on the plate for lithography, which enables an operating efficiency to be enhanced.read more
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