Patent
Micromachined inertial sensor devices
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TLDR
In this article, a micromachined inertial sensor with a single proof-mass was used to measure angular rates about three axes with single drive motion and linear accelerations about the three axes.Abstract:
A micromachined inertial sensor (200) with a single proof-mass (201) or measuring 6-degree-of-motions. The single proof-mass (201) includes a frame (202), an x-axis proof mass section (212a, 212b) attached to the frame by a first flexure, and a y-axis proof mass section (218) attached to the frame (202) by a second flexure (228a, 228b). The single proof-mass (201) is formed in a micromachined structural layer and is adapted to measure angular rates about three axes with a single drive motion and linear accelerations about the three axes.read more
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References
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MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness
Andrei M. Shkel,Cenk Acar +1 more
TL;DR: In this paper, structural approaches to improve robustness of MEMS Vibratory Gyroscopes have been discussed, including linear multi-DOF architecture, Torsional Multi-DoF architecture and distributed mass architecture.
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