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Patent

Micromechanical optical switch

TLDR
In this paper, an optical switch element is described, which includes a fixed layer disposed outwardly from a substrate and a movable mirror assembly disposed inwardly from the fixed layer.
Abstract
An optical switch element is described, which includes a fixed layer disposed outwardly from a substrate and a movable mirror assembly disposed outwardly from the fixed layer. The moveable mirror assembly is operable to move relative to the fixed layer responsive to a voltage applied to the movable mirror assembly. In a particular embodiment, the movable mirror assembly includes an inner strip spaced apart from the fixed layer by a first distance and an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance. The optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.

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Citations
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Patent

Interferometric modulation of radiation

Mark W. Miles
TL;DR: An Interferometric Modulator (IMod) as discussed by the authors is a microelectromechanical device for modulating light using interference, which can be used in both embedded and directly perceived applications, providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.
Patent

Photonic mems and structures

Mark W. Miles
TL;DR: In this paper, an efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices, which can be field reconfigured to accommodate different display formats and/or application functions.
Patent

A microelectromechanical systems device and method for fabricating same

TL;DR: In this paper, a method for fabricating a microelectromechanical system device is described, which consists of fabricating an array of first elements, each first element conforming to a first geometry; fabricating at least one array of second elements and normalizing differences in an actuation voltage required to actuate each of the first and second elements, wherein the differences are as a result of the selected defining aspect.
Patent

A method for fabricating a structure for a microelectromechanical systems (mems) device

Mark W. Miles
TL;DR: In this paper, a microfabrication process for MEMS devices is described, which may be used to manufacture a MEMS device, and the process comprises depositing one or a stack of layers on a base layer, said one layer or an uppermost layer in said stack being a sacrificial layer; patterning said one or stack of layered layers to provide at least one aperture therethrough through which said base layer is exposed; depositing a photosensitive layer over said layer; and passing light through said at least 1 aperture to expose said photo sensitive layer.
Patent

Process for modifying offset voltage characteristics of an interferometric modulator

TL;DR: In this paper, a process for modifying the processing parameters to shift the non-zero offset voltage closer to zero has been developed, which may have improved performance and/or simpler drive schemes.
References
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Patent

Method and apparatus for modulating a light beam

TL;DR: In this paper, a modulator consisting of a plurality of equally spaced-apart elements, each of which includes a light-reflective planar surface, is proposed. But the modulator is not suitable for the case where the elements are arranged parallel to each other.
Patent

Visible spectrum modulator arrays

Mark W. Miles
TL;DR: In this paper, an array of modulation elements is modulated using a control circuitry connected to the array for controlling each of the modulation elements independently, each modulation element having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light.
Patent

Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

TL;DR: In this article, a spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry, where one or more electrostatically deflectable elements are suspended by hinges from the upper substrate.
Patent

DMD architecture and timing for use in a pulse width modulated display system

TL;DR: In this paper, the authors proposed a system architecture, individual part of the system and techniques for minimizing the burst data rate while maintaining a reasonable system speed, and the resultant system provides better resolution with a manageable data rate and bandwidth.
Patent

Multi-level digital micromirror device

TL;DR: In this article, an improved hidden hinge digital micromirror device is presented, having hinges attached to a yoke 428 which limits the rotation of the device mirror 430, which is fabricated using two sacrificial spacer layers 404, 414 which are removed to allow the mirror 430 to rotate.