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Miniature silicon condenser microphone and method for producing same

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TLDR
In this article, a silicon condenser microphone package consisting of a transducer unit, a substrate, and a cover is described, which is attached to the upper surface of the substrate and overlaps at least a portion of the recess.
Abstract
A silicon condenser microphone package is disclosed. The silicon condenser microphone package comprises a transducer unit, a substrate, and a cover. The substrate includes an upper surface having a recess formed therein. The transducer unit is attached to the upper surface of the substrate and overlaps at least a portion of the recess wherein a back volume of the transducer unit is formed between the transducer unit and the substrate. The cover is placed over the transducer unit and includes an aperture.

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Citations
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Miniature Silicon Condenser Microphone

TL;DR: In this article, a silicon condenser microphone package includes a transducer unit, a substrate, and a cover, which is attached to the upper surface of the substrate and overlaps at least a portion of the recess.
References
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Patent

Microelectromechanical system package with environmental and interference shield

TL;DR: In this paper, a microelectromechanical system package is described, which includes an acoustic port for allowing an acoustic signal to reach the micro-EM system microphone, a substrate, and a cover.
PatentDOI

Miniature silicon condenser microphone

TL;DR: In this article, a transducer is mounted on a silicon die attached to a flexible circuit, and a jacket is designed to protect the transducers from light and electromagnetic interferences.
Patent

Surface acoustic wave device mounted module

TL;DR: In this article, a surface acoustic wave device mounted module is presented, which includes a multilayer substrate which has at least one layer of a shield pattern, input-output electrodes, grounding electrodes, through holes used for connecting electrodes, and a surface acyclic wave element.
Patent

Miniature broadband acoustic transducer

TL;DR: In this article, an acoustic transducer with a fixed perforated member and a freely movable diaphragm spaced from the perforator is described, and a support ring is used to maintain the proper spacing between the diaphrasm and the performer near the perimeter.
Patent

Miniature Silicon Condenser Microphone

TL;DR: In this article, a silicon condenser microphone package includes a transducer unit, a substrate, and a cover, which is attached to the upper surface of the substrate and overlaps at least a portion of the recess.