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Modeling and Simulation of RF Discharges Used for Plasma Processing.
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The article was published on 1993-01-01 and is currently open access. It has received 14 citations till now. The article focuses on the topics: Plasma processing & Modeling and simulation.read more
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Journal ArticleDOI
Simultaneous Potential and Circuit Solution for Two-Dimensional Bounded Plasma Simulation Codes
Vahid Vahedi,Gregory DiPeso +1 more
TL;DR: PDP2 is used to simulate a dually excited capacitively coupled RF discharge and it is shown how such a system can be used as a plasma processing tool with separate control over ion flux and ion bombarding energy.
Journal ArticleDOI
Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. II. Comparisons with laboratory measurements of electron energy distribution functions
TL;DR: In this paper, particle-in-cell Monte-Carlo (PIC-MCC) simulations were used to obtain the same transition point in the electron heating mode, from stochastically dominated heating at low pressures to ohmically dominating heating at high pressures, and excellent agreement was obtained between the effective low and high electron temperatures in simulations and those measured in the laboratory.
Journal ArticleDOI
Modelling electronegative discharges at low pressure
TL;DR: In this paper, a macroscopic analytical model was developed for a plasma discharge with a three-component (electronegative) core and an electropositive edge region.
Journal ArticleDOI
Transitions and scaling laws for electronegative discharge models
TL;DR: In this article, the equilibrium of electronegative discharges is studied in the plane-parallel approximation over a wide range of pressures and electron densities, encompassing a number of regimes that have previously been modeled analytically.
Journal ArticleDOI
Equilibrium theory of cylindrical discharges with special application to helicons
Davide Curreli,Francis F. Chen +1 more
TL;DR: In this paper, a universal profile for all discharges with uniform electron temperature Te and neutral density nn was obtained, which is self-similar for discharges using a simple cylindrical model in one dimension.