Patent
Multi-gap magnetic imaging lens for charged particle beams
TLDR
A magnetic lens for imaging and rotation of a charged particle beam includes a pair of focus elements axially spaced along a lens bore through which the beam passes and a rotation element positioned axially between the focus elements as discussed by the authors.Abstract:
A magnetic lens for imaging and rotation of a charged particle beam includes a pair of focus elements axially spaced along a lens bore through which the beam passes and a rotation element positioned axially between the focus elements. Each of the lens elements includes a polepiece having opposing portions surrounding the lens bore and axially spaced apart to define a circumferential gap, and a winding for energizing the polepiece and the gap. The focus elements are energized by equal and opposite magnetic fields which focus the electron beam without substantial beam rotation. The beam can be rotated, without substantial change in focus or magnification, by varying the magnetic field of the rotation element. The lens is particularly suited for use in a shaped electron beam lithography system.read more
Citations
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Patent
System and method for magnetic scanning, accelerating, and implanting of an ion beam
TL;DR: In this article, a magnetic detector and a compensator for high perveance ion beams, operating at 20 Hz fundamental and substantially higher order harmonics, having a magnetic structure formed of laminations with thickness in range between 0.2 and 1 millimeter, is presented.
Patent
System for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanning
TL;DR: In this article, a scanning system is shown for deflecting the beam in two dimensions relative to a reference axis and a magnetic ion beam transport system is arranged to receive the beam from the scanning system over the range of two dimensional deflections of the scanning systems and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired relationship with the axis in the two dimensions at the desired instantaneous two dimensional displacement of the beamfrom the axis, to produce the desired scan of the beacon over the substrate.
Patent
Apparatus for generating a plurality of beamlets
TL;DR: In this article, an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating diverging charged particle beams, a converging means for refracting said diverging particle beam and a lens array comprising a pluralityof lenses, was proposed.
Patent
Charged particle beamlet exposure system
TL;DR: In this paper, the authors proposed a chargedparticle-optical system for a charged particle beam exposure apparatus, which consisted of a first aperture, a second aperture, and a deflector.
Patent
System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions
TL;DR: In this article, a magnetic detector and a compensator for high perveance ion beams, operating at 20 Hz fundamental and substantially higher order harmonics, having a magnetic structure formed of laminations with thickness in range between 0.2 and 1 millimeter, is presented.
References
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Journal ArticleDOI
Miniature rotation-free magnetic electron lenses for the electron microscope
TL;DR: In this article, a rotation-free magnetic electron lens doublet of high magnification is described which is suitable for a transmission electron microscope and a distortion-free image can be obtained at low magnification.
Patent
Method of and device for adjusting a shaped-electron-beam working device
TL;DR: In this article, a method of and a device for adjusting a shaped-electron-beam working device which includes means for deflecting a shaped electron beam in the target plane and means for varying the shaped, preferably rectangular electron beam.
Patent
Electron lens equipped with three magnetic pole pieces
TL;DR: In this paper, an electron lens equipped with three magnetic pole pieces defining two gaps forms two magnetic fields, and the magnetic fields are generated in said gaps by opposite and same strength excitation.
Patent
Electron lens equipment
TL;DR: An electron lens system wherein at least two coils are arranged in the vicinity of an electron-optical lens and are excited in directions opposite to each other, making it possible to adjust the focal distance of the lens without including a rotation attributed to the EO lens in an electron beam which passes through the lens as mentioned in this paper.