Proceedings ArticleDOI
New technique for testing large optical flat
Qingyun Wang,Jinbang Chen,Rihong Zhu,Lei Chen,Yiguang Zhang +4 more
- Vol. 2003, pp 389-397
TLDR
This paper discusses the development of a new technique for testing larger optical flat only by means of a smaller interferometer, an overlapping subaperture interference testing (OSIT) technique, which has established a mathematics model for OSIT to retrieve the surface of the full aperture.Abstract:
This paper discusses the development of a new technique (including theory, method, and equipment, etc.) for testing larger optical flat only by means of a smaller interferometer. It is an overlapping subaperture interference testing (OSIT) technique. The author has established a mathematics model for OSIT to retrieve the surface of the full aperture. The theoretical accuracy of the retrieved surface of the full aperture reached (lambda) /200 (p-v). The relationship between the accuracy of the retrieved wavefront of full aperture and errors (such as system error of interferometer or position error of subapertures, etc.) has been investigated. A computer program was established to simulate the real procedure from testing surface data of subaperture to retrieved wavefront of full aperture.read more
Citations
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Proceedings ArticleDOI
Inverse Hartmann surface form measurement based on spherical coordinates
TL;DR: In this paper, the inverse Hartmann surface form measurement based on spherical coordinates is presented, which reduces the measured ray slope, increases the measurement range, and its accuracy of form error is higher than that in rectangular coordinates.
References
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Proceedings ArticleDOI
Inverse Hartmann surface form measurement based on spherical coordinates
TL;DR: In this paper, the inverse Hartmann surface form measurement based on spherical coordinates is presented, which reduces the measured ray slope, increases the measurement range, and its accuracy of form error is higher than that in rectangular coordinates.