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Patent

Piezoelectric optical beam deflector

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TLDR
In this paper, a piezoelectric bimorph scanner is disclosed which has a flexural beam attached to the free end of a cantilever mounted bimomorph crystal.
Abstract
A piezoelectric bimorph scanner is disclosed which has a flexural beam attached to the free end of a cantilever mounted piezoelectric bimorph crystal. A mirror is bonded to the flexural beam a predetermined distance from the bimorph crystal. An AC voltage of predetermined frequency is applied to the bimorph crystal causing the flexural beam to oscillate with a node at the center of the mirror. The mirror rotates about the node rather than swinging in an arc, enabling the scanner to deflect a collimated light beam over a larger deflection angle than heretofore possible without additional light beam control apparatus. In an alternate embodiment, a laser diode may be mounted on the flexural beam instead of the mirror, further reducing costs and components.

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Citations
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References
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Patent

Electromechanical monolithic resonator

TL;DR: In this article, an excitation element is formed in the substrate at a suitable location to cause mechanical strain in the semiconductor substrate by a thermal expansion mechanism, and a device is added to the substrate to convert mechanical stresses into electrical phenomena.
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Lever-action mountings for beam steerer mirrors

TL;DR: In this article, flexible hinges are employed to avoid any introduction of play or looseness between the mirror and mirror driver in a mirror-type light beam deflector or steerer, which utilizes a hinged mounting linkage to couple a beam deflecting mirror to a mirror driving apparatus.
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Piezoelectric light beam deflector

TL;DR: In this article, a light deflection device is defined by a piezoelectric bimorph of a known type which has been modified according to this invention so as to make each Bimorph layer totally internally reflecting.
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Piezoelectric apparatus for producing rotary oscillation of a mirror

TL;DR: In this article, an AC voltage U having a frequency which differs significantly from the natural resonant frequency of the piezoceramic strips is used to energize the strips to execute oscillations so that their free ends are periodically displaced in counterphase to one another.
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Fiber optic scanners

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TL;DR: In this article, the beam is then collimated and applied to a narrow rectangular bundle of fiber optic elements that are driven orthogonally to the linear scan of the beam to form a scan over a plane surface.