Patent
Piezoelectric resonator including an acoustic reflector portion
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TLDR
In this paper, a piezoelectric resonator that achieves stable quality and improved resonance characteristics includes an acoustic reflector portion disposed between a substrate and a vibration portion, which includes a thin film sandwiched between a pair of electrodes, and a plurality of low acoustic impedance layers made of a material having relatively low impedance and a higher acoustic impedance layer made of high acoustic impedance.Abstract:
A piezoelectric resonator that achieves stable quality and improved resonance characteristics includes an acoustic reflector portion disposed between a substrate and a vibration portion, which includes a piezoelectric thin film sandwiched between a pair of electrodes, and a plurality of low acoustic impedance layers made of a material having relatively low acoustic impedance and a plurality of high acoustic impedance layers formed made of a material having relatively high acoustic impedance, the acoustic impedance layers being disposed alternately, and adjustment layers, which are disposed between the high acoustic impedance layers and the low acoustic impedance layers on the substrate sides of the high acoustic impedance layers and which have an acoustic impedance value intermediate between that of the high acoustic impedance layers and that of the low acoustic impedance layers. The low acoustic impedance layers and the high acoustic impedance layers have compressive stresses and the adjustment layers have a tensile stress.read more
Citations
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TL;DR: In this article, an interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm.
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TL;DR: In this paper, an acoustic resonator includes a substrate and a lithium niobate plate having parallel front and back surfaces, the back surface attached to a surface of the substrate except for a portion of the LN plate forming a diaphragm that spans a cavity in the substrate.
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Transversely-excited film bulk acoustic resonator
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TL;DR: In this article, an acoustic resonator includes a substrate and a piezoelectric plate having parallel front and back surfaces, the back surface attached to the substrate, and an interdigital transducer is formed on the front surface of the plate such that interleaved fingers of the IDT are disposed on a portion of the pieziolectric plates suspended over a cavity formed in the substrate.
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TL;DR: In this article, the authors describe a resonator device consisting of a substrate and a single-crystal piezoelectric plate having parallel front and back surfaces, where an acoustic Bragg reflector is sandwiched between a surface of the substrate and the back surface of a singlecrystal PPE.
Proceedings ArticleDOI
Integration of RF MEMS resonators and phononic crystals for high frequency applications with frequency-selective heat management and efficient power handling
Humberto Campanella,Nan Wang,Margarita Narducci,Jeffrey B.W. Soon,Chong Pei Ho,Chengkuo Lee,Alex Yuandong Gu +6 more
TL;DR: In this paper, a radio frequency micro electromechanical system (RFMEMS) was integrated with phononic crystals (PnC) to provide a Lamb-wave resonator with frequency-selective heat management, power handling capability, and more efficient coupling at ultra high frequency and low microwave bands.
References
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Patent
Solidly mounted multi-resonator bulk acoustic wave filter with a patterned acoustic mirror
TL;DR: In this paper, a method of fabricating a multi-resonator bulk acoustic wave (BAW) filter and a filter provided by such a method, the filter having a plurality of layers of materials serving as an acoustic mirror for the plurality of resonator sections.
Patent
Acoustic resonator and its fabricating method
TL;DR: In this paper, the tensile and compression stress in a piezoelectric layer are adjusted to cancel each other to prevent the occurrence of cracks and to realize a high electromechanical coupling coefficient.
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Bulk acoustic resonator and filter element
TL;DR: A bulk acoustic resonator has an acoustic reflector portion formed on a substrate and including one or more low acoustic impedance layers and one high acoustic impedance layer having a higher acoustic impedance than the low impedance layer which are disposed in stacked relation and having a piezoelectric film.
Patent
Acoustic resonator and filter
TL;DR: In this paper, a first supporting section is provided between a substrate section (40) and a second supporting section (20), which is composed of a film formed of a material having an acoustic impedance higher than those of a piezoelectric body (11) and the substrate sections (40).
Patent
Thin film piezo-electric resonator and thin film piezo-electric filter
TL;DR: In this paper, a thin-film piezo-electric resonator was proposed to suppress a generation of unnecessary horizontal acoustic mode. But, the upper electrode is not formed in the domain which includes straight lines passing along the center of this circular shape while having the length of 1/50 of the diameter, and the outline of the portion where the upper and lower electrodes overlap mutually in the thickness direction is rectangular.