Patent
Polarization preserving optical systems
TLDR
Polarization preserving optical systems as discussed by the authors can be used in the field of distance measuring interferometry (DMI) to enhance measurement accuracy by reducing undesirable polarization effects that can introduce errors associated with an otherwise present undesirable polarization rotation found in classical retroreflectors.Abstract:
Polarization preserving optical systems for use in deviating plane polarized beams (371, 372) through preselected angles without changing their linear state of polarization. A plurality of reflecting surfaces are arranged such that the light incident thereon is always P-polarized or S-polarized. Prismatic optical elements (310, 320, 330, 340) are preferably used to construct assemblies including mirrored surfaces and/or total internal reflection (TIR) surfaces. The assemblies can also include polarization beam splitting coating arrangements and/or birefringent materials to enhance the extinction ratio between orthogonally polarized beams propagating through such systems. The optical systems have a variety of applications and are particularly suitable for use in the field of distance measuring interferometry (DMI) to enhance measurement accuracy by reducing undesirable polarization effects that can introduce errors associated with an otherwise present undesirable polarization rotation found in classical retroreflectors. Non-retroreflecting embodiments are also presented.read more
Citations
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Patent
Systems using polarization-manipulating retroreflectors
Zhu Miao,Bockman John J +1 more
TL;DR: In this paper, a cube corner reflector with one or more polarization manipulating elements is used to preserve or transform the polarization of an incident beam to avoid unwanted mixing of the polarization components.
Patent
Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components
Peter J. de Groot,Henry A. Hill +1 more
TL;DR: In this paper, a small angular difference in the propagation directions of orthogonally polarized components of an input beam to an interferometer is used to distinguish between the reference and measurement beam components of the input beam.
Patent
Distance measuring interferometer and encoder metrology systems for use in lithography tools
TL;DR: In this article, the authors present a system that includes a moveable stage, an interferometer configured to provide information about a first degree of freedom of the stage and an encoder configured to determine the second degree.
Patent
Multiple-degree of freedom interferometer with compensation for gas effects
TL;DR: In this paper, the authors present a disclosure of multiple degree-of-freedom interferometers for monitoring linear and angular displacements of a measurement object with compensation for variations in the optical properties of a gas in the interferometer measurement and/or reference beam paths.
References
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Patent
Heterodyne interferometer system
TL;DR: In this paper, a heterodyne interferometer system utilizes a single stabilized frequency linearly polarized laser input beam (18) from a light source (10) which is provided to an acousto-optic device (20) along with a frequency stabilized electrical reference signal (32) from an oscillator (30) for transforming the input beam into a pair of orthogonally polarized beams (40,50) differing in frequency by the reference signal frequency prior to providing these beams to a polarization type interferometers (70).
Patent
Linear and angular displacement measuring interferometer
TL;DR: In this paper, a single interferomter system capable of measuring accurately linear displacement and angular displacement simultaneously of a movable plane mirror (90) comprises a source (10) of a frequency stabilized input beam (12), a polarization beamsplitter (80), two quarter-wave plates (88, 108), a mirror (89), and a retroreflector (81), to reflect one polarization component of the input beam(12) twice from the movable mirror(90) to produce a first output beam and to reflect the other polarization component from the stationary mirror(89
Patent
Linear and angular displacement measuring interferometer
TL;DR: In this paper, an interferometer system capable of measuring linear displacement and angular displacement simultaneously of a movable plane mirror (90) comprises a source (10) of a frequency stabilized input beam (12) and includes an optical system which reflects one polarization component of the input beam(12) twice from a first position on the movable planes mirror (120) to produce beams (30) and reflects the other polarization component (28) from a stationary plane mirror to produce beam (28), in which the phase difference between the two components of the third output beam (66) is
Patent
Dual high stability interferometer
Carl A. Zanoni,Alan H. Field +1 more
TL;DR: In this paper, a dual high stability interferometer system capable of measuring linear and angular displacement simultaneously of a movable plane mirror (90) comprises a frequency stabilized laser input beam (10) which is divided into two parallel spatially displaced beams by a beamsplitter.
Patent
Achromatic polarization-rotating right-angle prism system
TL;DR: In this paper, achromatic polarization-rotating right-angle prism system for rotating the plane of polarization of an electric field, E, by 90° while maintaining strict linear polarization at all wavelengths.