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Self-aligned gate field effect transistor with schottky barrier drain and source

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TLDR
In this paper, a self-altering gate technology is used in the construction of a field effect transistor in a large-scale environment, where MANY SUCH ALIGNMENTS MUST be made SIMULTANTEOUSLY.
Abstract
A LOW PARASITIC CAPACITANCE FIELD EFFECT TRANSISTOR IS FABRICATED BY THE UTILIZATION OF A SELF-ALIGNING GATE TECHNIQUE. A METAL GATE IS FORMED AND THEN, EMPLOYING THE GATE AS A MASK, LOW TEMPERATURE SCHOTTKY BARRIER SOURCE AND DRAIN JUNCTIONS ARE FORMED. THE TECHNIQUE IS PARTICULARLY USEFUL IN THE FABRICATION OF THE FIELD EFFECT TRNASISTOR AS AN ELEMENT OF A LARGE INTEGRATED CIRCUIT WHERE MANY SUCH ALIGNMENTS MUST BE MADE SIMULTANTEOUSLY. D R A W I N G

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