Patent
Self-aligning electroplating mask
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TLDR
In this article, a self-aligning electroplating mask and a method of electroplated using a self aligning mask is described. But the method is not described.Abstract:
A self-aligning electroplating mask and a method of electroplating using a self-aligning mask is disclosed. A layer of metal, for example, titanium, is deposited on a substrate. On top of the titanium film is deposited a film of a second metal such as platinum. The platinum metal is etched to expose the titanium. The exposed titanium is oxidized to provide a self-aligning mask. The titanium oxide mask enables a subsequent electroplating step to deposit a metal such as gold on top of the remaining platinum film. Then the titanium oxide mask is removed.read more
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References
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Technique for fabrication of semiconductor device
TL;DR: In this article, a self-aligning gate region comprising a noble metal-silicon-oxygen alloy serves as a mask for the source and drain diffusions and serves as gate electrode.