Patent
Spatial light modulator with superstructure light shield
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TLDR
In this article, a high contrast spatial light modulator (40) is formed of micro-mechanical pixels (10), and the supporting superstructure comprising the posts and hinges of the pixels are shielded by an umbrella-like elevated light shield (42) extending over the hinge and posts.Abstract:
A high contrast spatial light modulator (40) formed of micro-mechanical pixels (10). The supporting superstructure comprising the posts (12) and hinges (16) of the pixels (10) are shielded by an umbrella-like elevated light shield (42) extending over the hinge and posts. These light shields (42) are generally square in shape, and have edges arranged at approximately 45° with respect to the incident light to minimize diffraction of light therefrom into projection optics. The upper surfaces of the shields may be anodized to achieve a non-reflective, black surface when viewed through darkfield optics. The shields (42) are fabricated using conventional semiconductor processes, which are a natural extension of the baseline process.read more
Citations
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References
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Patent
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TL;DR: An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes as mentioned in this paper.
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