Can inert gases be used to purge catalysts such as indium oxide?
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Inert gases, such as nitrogen, can indeed be utilized for purging purposes in various applications involving catalysts like indium oxide. For instance, inert gas purge systems are designed to enhance efficiency and throughput by reducing purge times . Additionally, inert gas purge stations are implemented to prevent oxidation on semiconductor materials by filling pods with inert gas, showcasing the protective role of inert gases in sensitive processes . Moreover, inert gases are employed in exposure apparatuses to maintain controlled environments during substrate exposure, highlighting their crucial role in ensuring optimal conditions for catalytic reactions . Overall, the use of inert gases for purging catalysts, including indium oxide, is a common practice in various industrial and semiconductor processes, contributing to improved performance and product quality.
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