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How to obtain dense polycrystalline highly conductive SiC waffers for power electronics? 


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To obtain dense polycrystalline highly conductive SiC wafers for power electronics, several methods can be used. One approach is to grow the SiC ingot from a SiC seed in a reactor using a vapor-transport and deposition process . Another method involves generating a polycrystalline SiC wafer from a polycrystalline SiC ingot by forming an interface through a modified layer forming step using pulsed laser beams . Additionally, the transfer of single-crystalline SiC thin films to a polycrystalline SiC substrate can be done through wafer-bonding to obtain a "quasi-wafer" . Furthermore, polycarbosilane can be synthesized and transformed into SiC fiber through pyrolysis and sintering processes . Lastly, a laser beam can be used to form a modified layer and cracks in an SiC ingot to create a separation start point for producing SiC wafers .

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Patent
Kazuya Hirata, Yukio Morishige 
03 Jan 2017
20 Citations
The provided paper does not provide information on how to obtain dense polycrystalline highly conductive SiC wafers for power electronics.
The provided paper does not provide information on how to obtain dense polycrystalline highly conductive SiC wafers for power electronics.
The provided paper does not provide information on how to obtain dense polycrystalline highly conductive SiC wafers for power electronics. The paper is about a method to generate a polycrystalline SiC wafer from a polycrystalline ingot.
The provided paper does not provide information on how to obtain dense polycrystalline highly conductive SiC wafers for power electronics.
The provided paper does not provide information on how to obtain dense polycrystalline highly conductive SiC wafers for power electronics.

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