How to standardize RF ICP chamber?
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Standardizing an RF ICP chamber involves various aspects such as construction, validation, and operational parameters. The process includes considerations like chamber dimensions, absorber selection, and system integration . Qualification and compliance testing are crucial, following standards like IEC 61000-4-3 . For effective operation, factors like substrate temperature, gas pressure, and RF power play key roles in achieving uniformity and efficiency . Models incorporating Maxwell's equations and Boltzmann equation aid in understanding the physics of ICP in RF ion thrusters, facilitating simulations and optimization of operating conditions . By adhering to these guidelines and utilizing advanced modeling techniques, RF ICP chambers can be standardized to ensure reliable and consistent performance in various applications.
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| The hybrid model in the paper investigates RF ICP chamber standardization by analyzing operating conditions' impact on electric field, power density, electron energy distribution, and plasma density. | |
| Standardize RF ICP chamber by optimizing antenna design for uniformity, low substrate temperature (<60°C), low pressure (3-5 Pa), and capacitive coupling to control impedance, ensuring efficient photoresist ashing. | |
| Not addressed in the paper. | |
Open access•Proceedings Article 01 Nov 2008 | The Anechoic Chamber at TBRL Chandigarh was standardized by conducting electric field uniformity measurements within the RF frequency band of 80 MHz to 1 GHz, following IEC 61000-4-3 guidelines. |
14 Jul 2013 | The RF ICP chamber in RF ion thrusters is standardized using a numerical model solving Maxwell's equations and applying approximations to simulate inductively coupled plasma behavior. |
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