Showing papers on "Plasma-enhanced chemical vapor deposition published in 1971"
51 citations
26 citations
Patent•
20 Sep 1971TL;DR: In this paper, it was shown that the deposition of zirconium carbide is useful for coating of a rocket nozzle surface, coating of granular fuels for gas cooled nuclear reactor and the like.
Abstract: Deposition of zirconium carbide on a substrate is advantageously effected by reacting zirconium and methyl iodide under heating. The deposition of zirconium carbide is useful for coating of a rocket nozzle surface, coating of granular fuels for gas cooled nuclear reactor and the like.
3 citations
Patent•
27 Dec 1971
TL;DR: An improved method of deposition of silicon by using pyrolysis of silane was proposed in this paper, which employs a carrier gas of a mixture of hydrogen gas and an inert gas such as argon, helium, neon, krypton, xenon, radon and nitrogen.
Abstract: An improved method of deposition of silicon by using pyrolysis of silane, which employs a carrier gas of a mixture of hydrogen gas and an inert gas such as argon, helium, neon, krypton, xenon, radon and nitrogen.
2 citations
01 Jan 1971
TL;DR: AECL-3674 Dépftt chimique de vapeur and essai d'éclatement des tubes en carbure de silicium by E. Phillips and K. Lukas as discussed by the authors.
Abstract: ATOMIC ENERGY OF CANADA LIMITED Whiteshell Nuclear Research Establishment Pinawa, Manitoba February, 1971 AECL-3674 Dépftt chimique de vapeur et essai d'éclatement des tubes en carbure de silicium par E. Phillips et K. Lukas