Showing papers by "Akira Kinbara published in 1969"
TL;DR: In this paper, a method for obtaining the optical constants and thickness of thin metal films during deposition using an automatic recording ellipsometer is described, where the restored azimuth ψ, the differential phase change on reflection Δ and the transmittance T have been continuously meaured during the film deposition.
Abstract: A method for obtaining the optical constants and thickness of thin metal films during deposition using an automatic recording ellipsometer is described. The restored azimuth ψ, the differential phase change on reflection Δ and the transmittance T have been continuously meaured during the film deposition. The optical constants and the packing factor are calculated from these three quantities and are given as functions of film thickness for various deposition conditions.
28 citations
TL;DR: In this article, an evaporating system using a liquid helium cryopump was constructed and its pumpdown curves and pressure change during evaporation were measured, and the internal stress and electrical resistivity of deposited aluminum films were investigated.
Abstract: An evaporating system using a liquid helium cryopump was constructed and its pumpdown curves and pressure change during evaporation were measured.Using this system, the internal stress and the electrical resistivity of deposited aluminum films were investigated. They are compared with the properties about the film deposited in the diffusion pump system and the difference between them is discussed.