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JournalISSN: 0559-8516

Shinku 

The Vacuum Society of Japan
About: Shinku is an academic journal. The journal publishes majorly in the area(s): Thin film & Sputtering. It has an ISSN identifier of 0559-8516. Over the lifetime, 1686 publications have been published receiving 2887 citations.


Papers
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Journal ArticleDOI
20 Jan 1983-Shinku
TL;DR: In this paper, a thin-film electron emitter with good reproducibility and stability was obtained when carbon films were deposited on a Corning 7059 glass rubbed with emery paper (#1000), and were heat-treated at 600°C in high vacuum.
Abstract: The purposes of the present work were to develop the fabrication techniques of a thin film electron emitter. Devices with good reproducibility and stability were obtained when carbon films were deposited on a Corning 7059 glass rubbed with emery paper (#1000), and were heat-treated at 600°C in high vacuum.When the input power density to the devices attained to about 2.4×108 W/cm3, the carbon films were locally broken due to the joule heating and electron emission from the devices became to be detected. The I-V characteristics after the forming were similar to those of the electroformed MIM type devices, and the emission efficiencies were (26) ×10-4.

123 citations

PatentDOI
Takashi Nagaoka1, Shinjiro Ueda1, Seiji Sakagami1, Akira Nishiuchi1, Hirofumi Sakurai1 
30 Sep 1991-Shinku
TL;DR: In this paper, a turbo-vacuum pump with an inlet port and an outlet port is described, and a cylindrical rotor is disposed in the housing and having a stepped peripheral surface and a plurality of blades secured to protruding corners of the steps.
Abstract: A compact, easy-to-handle turbo vacuum pump includes a housing having an inlet port and an outlet port; a cylindrical rotor disposed in the housing and having a stepped peripheral surface and a plurality of blades secured to protruding corners of the steps; and a pumping mechanism portion in which a pumping stage is formed by a stator which faces the blades of the rotor across a narrow gap, and in which peripheral pump flow paths are provided in step-like recessions inside the stator. The turbo vacuum pump further includes a rotating shaft which is connected to the rotor and is rotatably supported by a radial gas bearing and a thrust gas bearing; and a motor portion for operating the rotor. Gas sucked in through the inlet port can be discharged into the atmosphere through the outlet port.

96 citations

Book ChapterDOI
20 May 1988-Shinku
TL;DR: In this paper, the formation and propagation of disturbance in an initially uniform gas bounded by its plane condensed phase in nonequilibrium with the gas are investigated in detail on the basis of the Boltzmann-Krook-Welander equation when evaporation takes place from the condensed phase.
Abstract: The formation and propagation of disturbance in an initially uniform gas bounded by its plane condensed phase in nonequilibrium with the gas are investigated in detail on the basis of the Boltzmann-Krook-Welander equation when evaporation takes place from the condensed phase. From the long time solution, the steady behavior of the gas (the transition region from the condensed phase to the uniform state at infinity, the relations among the variables at infinity and on the condensed phase) is clarified. Further the effect of different boundary conditions at the condensed phase on the steady evaporation is discussed.

66 citations

Journal ArticleDOI
20 Mar 1990-Shinku
TL;DR: It is confirmed that Knudsen will not be seeking re-election for the third time this year.
Abstract: 近年 コンピュータの発達に よって種 々の希薄気流 の精 密 な数値 解析 も軌道 にの りつつあ る1~3).必要 な系の数 値 解 析 が 行 わ れ て も,そ れ は 限 られ た 離 散 的 な Knudsen数(Kn=l/L,l:気 体分子 の平均 自由行程 1), L:系 の代表長)に 対 して結果が得 られ るのみ で,実 用 上任意 のKnudsen数 に対 して資料 が必要 な ときには, 得 られた結果か ら内挿等 で近似す るか,新 たに数値計算 を行わなければ な らない.な お前者 の場合で も十分な精 度 を保証 す るだけの資 料が提供 され てい るとは限 らな い.そ こで本研究 では,一 般に希薄気体の境界値 問題 に 対 して任意 のKnudsen数 に対す る解 をすば や く得 る新 しい数値 計算法 として変形Knudsen数 展開法を提案 し, 平 行平板間お よび円管内をす ぎるPoiseuille流 と熱遷移 流 を例 に とって具 体的 に解析 を行 い,任 意 の Knudsen 数 に対す るこれ らの流れの流速 分布 お よび流量が短時間 (各場 合数秒単位)に 得 られ るNECPC9800シ リーズ用 の ソフ トウェアを作成 した.

43 citations

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Performance
Metrics
No. of papers from the Journal in previous years
YearPapers
20155
20142
20131
20102
20092
20087