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Benjamin A. Griffin
Researcher at Sandia National Laboratories
Publications - 32
Citations - 410
Benjamin A. Griffin is an academic researcher from Sandia National Laboratories. The author has contributed to research in topics: Microphone & Microelectromechanical systems. The author has an hindex of 8, co-authored 32 publications receiving 290 citations. Previous affiliations of Benjamin A. Griffin include University of Florida.
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Journal ArticleDOI
An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications
TL;DR: In this paper, a micro-machined microphone for aircraft fuselage arrays is presented, which utilizes piezoelectric transduction via an integrated aluminum nitride layer in a thin-film composite diaphragm.
Journal ArticleDOI
Acoustic waveguiding in a silicon carbide phononic crystals at microwave frequencies
TL;DR: In this article, two-dimensional SiC-air phononic crystals and waveguides were fabricated using a CMOS-compatible process, which allows for seamless integration of these devices into wireless communication systems operating at microwave frequencies.
Journal ArticleDOI
Thermal Conductivity of Aluminum Scandium Nitride for 5G Mobile Applications and beyond
Yiwen Song,Carlos Perez,Giovanni Esteves,James Spencer Lundh,Christopher B. Saltonstall,Thomas E. Beechem,Jung In Yang,Kevin Ferri,Joseph E. Brown,Zichen Tang,Jon Paul Maria,David W. Snyder,Roy H. Olsson,Benjamin A. Griffin,Susan Trolier-McKinstry,Brian M. Foley,Sukwon Choi +16 more
TL;DR: In this article, the thermal conductivity of Al1-xScxN films (3-8 W m-1 K-1) grown by reactive sputter deposition was found to be orders of magnitude lower than that for c-axis-textured AlN films due to alloying effects.
Journal ArticleDOI
Aluminum Nitride Ultrasonic Air-Coupled Actuator
TL;DR: In this article, a piezoelectric micromachined ultrasonic radiator was developed using aluminum nitride (AlN) for air-coupled applications, which consists of a radially nonuniform circular composite diaphragm with an integrated layer of AlN between two annular electrodes.
Proceedings ArticleDOI
Near-zero power accelerometer wakeup system
Robert W. Reger,Barney Bryson,Sean Yen,Michael Satches,Michael Wiwi,André Young,Matthew A. Delaney,Benjamin A. Griffin +7 more
TL;DR: A piezoelectric microelectromechanical accelerometer is coupled with a complementary metal-oxide-semiconductor comparator to create a near-zero power wakeup system that is shown to wake up to a target frequency signature of a generator while rejecting background noise as well as non-target frequency signatures.