C
C. Cerjan
Publications - 2
Citations - 83
C. Cerjan is an academic researcher. The author has contributed to research in topics: Aerial image & Extreme ultraviolet. The author has an hindex of 2, co-authored 2 publications receiving 83 citations.
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Practical approach for modeling extreme ultraviolet lithography mask defects
TL;DR: In this paper, a single surface approximation (SSA) was proposed to calculate the extreme ultraviolet (EUV) scattering from a defect within a multilayer coating, where the defective multi-layer structure was replaced by a single reflecting surface with the shape of the top surface of the multilayers.
Journal Article
A practical approach for modeling EUVL mask defects
TL;DR: In this paper, a single surface approximation (SSA) is proposed to calculate the EUV scattering from a defect within a multilayer coating, where the defective multi-layer structure is replaced by a single reflecting surface with the shape of the top surface of the multilayers.