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C. H. Lai
Researcher at TSMC
Publications - 1
Citations - 8
C. H. Lai is an academic researcher from TSMC. The author has an hindex of 1, co-authored 1 publications receiving 8 citations.
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Journal ArticleDOI
C Redistribution during Ni Silicide Formation on Si1 − y C y Epitaxial Layers
Sheng Wei Lee,S. S. Huang,H. C. Hsu,Chun-Wen Nieh,Wen-Chi Tsai,C. P. Lo,C. H. Lai,P. Y. Tsai,M. Y. Wang,Chii-Ming Wu,Ming-Ta Lei +10 more
TL;DR: In this paper, the formation of Ni silicides on Si 1-y C y (0 ≤ y ≤ 0.02) epilayers grown on Si(001) was investigated and an abnormal redistribution of C atoms in the NiSi thin films was observed during Ni silicidation.