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Chung-Long Chang
Researcher at TSMC
Publications - 1
Citations - 213
Chung-Long Chang is an academic researcher from TSMC. The author has contributed to research in topics: Polishing & Chemical-mechanical planarization. The author has an hindex of 1, co-authored 1 publications receiving 213 citations.
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Patent
Copper chemical-mechanical-polishing (CMP) dishing
TL;DR: In this article, a method for forming inlaid copper interconnects in an insulating layer without the normally expected dishing that occurs after chemical-mechanical polishing of the excess copper is disclosed.