D
D. E. Pariev
Researcher at Russian Academy of Sciences
Publications - 10
Citations - 146
D. E. Pariev is an academic researcher from Russian Academy of Sciences. The author has contributed to research in topics: Reflection (physics) & Reflection coefficient. The author has an hindex of 5, co-authored 10 publications receiving 112 citations.
Papers
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Journal ArticleDOI
High-reflection Mo/Be/Si multilayers for EUV lithography
Nikolai I. Chkhalo,Sergei A Gusev,A. N. Nechay,D. E. Pariev,Vladimir N. Polkovnikov,Nikolai N. Salashchenko,Franz Schäfers,M.G. Sertsu,Andrey Sokolov,M. V. Svechnikov,Dmitry A Tatarsky +10 more
TL;DR: Calculations show that by optimizing the thickness of the Be layer it should be possible to increase the reflection coefficient by another 0.5-1%.
Journal ArticleDOI
Extended model for the reconstruction of periodic multilayers from extreme ultraviolet and X-ray reflectivity data
Michael Svechnikov,D. E. Pariev,A. N. Nechay,N. N. Salashchenko,Nikolay I. Chkhalo,Yuly Vainer,Dmitry Gaman +6 more
TL;DR: In this paper, an extended model for the reconstruction of multilayer nanostructures from reflectometry data in the X-ray and extreme ultraviolet ranges is proposed, where the transition layer is sought as a linear combination of several functions at once in the extended model.
Journal ArticleDOI
Be/Al-based multilayer mirrors with improved reflection and spectral selectivity for solar astronomy above 17 nm wavelength
Nikolay I. Chkhalo,D. E. Pariev,Vladimir N. Polkovnikov,N. N. Salashchenko,R.A. Shaposhnikov,I. L. Stroulea,M. V. Svechnikov,Yu. A. Vainer,S. Yu. Zuev +8 more
TL;DR: In this article, it was shown that in the vicinity of 17nm wavelength, Be can be used as an optically contrasting material with Al in periodic multilayer mirrors, and the increase of the reflection coefficient was conditioned by smoothing the interfaces from root-mean-square value of 1.3 nm in pure Be/Al structures to 0.6 nm in Si-containing samples.
Journal ArticleDOI
Study of oxidation processes in Mo/Be multilayers
A. N. Nechay,Nikolay I. Chkhalo,M. N. Drozdov,S. A. Garakhin,D. E. Pariev,Vladimir N. Polkovnikov,N. N. Salashchenko,M. V. Svechnikov,Yu. A. Vainer,E. Meltchakov,F. Delmotte +10 more
TL;DR: In this article, the results of an investigation on oxidation processes in Mo/Be multilayer nanofilms are presented, and the activation energy of the oxidation process is estimated to be 38 kJ/mol.
Journal ArticleDOI
Set of Multilayer X-Ray Mirrors for a Double-Mirror Monochromator Operating in the Wavelength Range of 0.41–15.5 nm
A. A. Akhsakhalyan,Yu. A. Vainer,S. A. Garakhin,K. A. Elina,P. S. Zavertkin,S. Yu. Zuev,D. V. Ivlyushkin,A. N. Nechay,A. D. Nikolenko,D. E. Pariev,R. S. Pleshkov,Vladimir N. Polkovnikov,N. N. Salashchenko,M. V. Svechnikov,Nikolay I. Chkhalo +14 more
TL;DR: In this article, a set of multilayer X-ray mirrors for an upgraded version of the double-mirror monochromator installed on the VEPP-5 synchrotron of the Budker Institute of Nuclear Physics is fabricated, its constituent parts are optimized, and its optical characteristics are studied.