D
D.-I. Cho
Researcher at Seoul National University
Publications - 1
Citations - 214
D.-I. Cho is an academic researcher from Seoul National University. The author has contributed to research in topics: Etching (microfabrication) & Reactive-ion etching. The author has an hindex of 1, co-authored 1 publications receiving 212 citations.
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The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon
TL;DR: The surface/bulk micromachining (SBM) process as discussed by the authors was proposed to fabricate released microelectromechanical systems using bulk silicon, where the exposed bare silicon is further reactive ion etched, which defines sacrificial gap dimensions and the final release is accomplished by undercutting the exposed bulk silicon sidewalls in aqueous alkaline etchants.