Ultrasonic imaging has been implemented as a powerful tool for noninvasive subsurface inspections of both structural and biological media. Current ultrasound probes are rigid and bulky and cannot readily image through nonplanar three-dimensional (3D) surfaces. However, imaging through these complicated surfaces is vital because stress concentrations at geometrical discontinuities render these surfaces highly prone to defects. This study reports a stretchable ultrasound probe that can conform to and detect nonplanar complex surfaces. The probe consists of a 10 × 10 array of piezoelectric transducers that exploit an "island-bridge" layout with multilayer electrodes, encapsulated by thin and compliant silicone elastomers. The stretchable probe shows excellent electromechanical coupling, minimal cross-talk, and more than 50% stretchability. Its performance is demonstrated by reconstructing defects in 3D space with high spatial resolution through flat, concave, and convex surfaces. The results hold great implications for applications of ultrasound that require imaging through complex surfaces.

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Stretchable ultrasonic transducer arrays for three-dimensional imaging on complex surfaces.

Integrated ultrasonic transducers (IUTs) and flexible ultrasonic transducers (FUTs) are presented for nondestructive testing at high temperatures. These transducers are made of sol–gel-sprayed piezoelectric thick (>40 μm) ceramic films. The ceramic materials are lead-zirconate-titanate, bismuth titanate and lithium niobate which are for thickness measurements up to 150, 400 and 800 °C, respectively. The IUT can also be deposited onto one end of a long ultrasonic delay line to perform nondestructive testing at the other end at even higher temperatures. FUTs made of bismuth titanate films onto thin stainless steel foils are also used for thickness measurements at 300 °C with a high-temperature couplant sandwiched between the FUT and a steel substrate. All experiments at high temperatures were performed in pulse-echo mode and ultrasonic echoes with signal-to-noise ratios above 20 dB were obtained. The center operation frequencies of both IUTs and FUTs range from 4.4 to 10.7 MHz.

High-temperature integrated and flexible ultrasonic transducers for nondestructive testing

Piezoelectric thin films are of increasing interest in low-voltage micro electromechanical systems for sensing, actuation, and energy harvesting. They also serve as model systems to study fundamental behavior in piezoelectrics. Next-generation technologies such as ultrasound pill cameras, flexible ultrasound arrays, and energy harvesting systems for unattended wireless sensors will all benefit from improvements in the piezoelectric properties of the films. This paper describes tailoring the composition, microstructure, orientation of thin films, and substrate choice to optimize the response. It is shown that increases in the grain size of lead-based perovskite films from 75 to 300 nm results in 40 and 20% increases in the permittivity and piezoelectric coefficients, respectively. This is accompanied by an increase in the nonlinearity in the response. Band excitation piezoresponse force microscopy was used to interrogate the nonlinearity locally. It was found that chemical solution-derived PbZr0.52Ti0.48O3 thin films show clusters of larger nonlinear response embedded in a more weakly nonlinear matrix. The scale of the clusters significantly exceeds that of the grain size, suggesting that collective motion of many domain walls contributes to the observed Rayleigh behavior in these films. Finally, it is shown that it is possible to increase the energy-harvesting figure of merit through appropriate materials choice, strong imprint, and composite connectivity patterns.

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Designing piezoelectric films for micro electromechanical systems

Flexible piezoelectric transducer for ultrasonic inspection of non-planar components

The paper presents the design and validation of body-conformal active ultrasound patches with integrated imaging and modulation modalities for image-guided neural therapy. A mechanically-flexible linear 64-element array of piezoelectric transducers with a resonance frequency of 5 MHz was designed for nerve localization. A second 8-element array using larger elements was integrated on the wearable probe for low intensity focused ultrasound neuromodulation at a resonance frequency of 1.3 MHz. Full-wave simulations were used to model the flexible arrays and estimate their generated pressure profiles. A focal depth of 10–20 mm was assumed for beamforming and focusing to support modulation of the vagus, tibial, and other nerves. A strain sensor integrated on the probe provides patient-specific feedback information on array curvature for real-time optimization of focusing and image processing. Each patch also includes high voltage (HV) multiplexers, transmit/receive switches, and pre-amplifiers that simplify connectivity and also improve the signal-to-noise ratio (SNR) of the received echo signals by $\sim$ 5 dB. Experimental results from a flexible prototype show a sensitivity of 80 kPa/V with $\sim$ 3 MHz bandwidth for the modulation and 20 kPa/V with $\sim$ 6 MHz bandwidth for the imaging array. An algorithm for accurate and automatic localization of targeted nerves based on using nearby blood vessels (e.g., the carotid artery) as image markers is also presented.

Flexible Body-Conformal Ultrasound Patches for Image-Guided Neuromodulation

Flexible ultrasonic transducers (UTs) consisting of a metal foil, a piezoelectric ceramic film, and a top electrode have been developed. The flexibility is realized owing to the porosity of piezoelectric film and the thinness of metal foil. In this paper, the stainless steel (SS), lead-zirconate-titanate (PZT)/PZT composite and silver paste were chosen as metal foil, piezoelectric film, and top electrode materials, respectively. The SS foil serves as both substrate and bottom electrode. The PZT/PZT piezoelectric composite film is made by the sol-gel spray technique. PZT/PZT films of thicknesses from 40 to 70 mum were fabricated onto SS foils. The capability of these flexible sensors operated in the pulse-echo mode for nondestructive testing on flat and curved surfaces of different materials at room temperature and 160degC has been demonstrated. Numerical simulations of the effects of the metal foil thickness on the ultrasonic performance of flexible UTs also were carried out, and the results are in reasonable agreement with experimental data. In addition, a PZT/PZT flexible transducer showed a signal strength comparable with that obtained by a commercial room temperature broad bandwidth transducer

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D. Levesque

Papers

Flexible ultrasonic transducers