D
D. Ward
Researcher at Massachusetts Institute of Technology
Publications - 3
Citations - 164
D. Ward is an academic researcher from Massachusetts Institute of Technology. The author has contributed to research in topics: Fabrication & Wafer. The author has an hindex of 3, co-authored 3 publications receiving 163 citations.
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Journal ArticleDOI
Multi-stack silicon-direct wafer bonding for 3D MEMS manufacturing
TL;DR: In this article, the problems and the solutions presented in this paper are readily applicable to any microelectromechanical system project involving the fabrication of multi-stack structures of two or more wafers containing intricate geometries and large etched areas.
Proceedings Article
Multi-stack silicon-direct wafer bonding for 3D MEMS manufacturing
TL;DR: In this article, the problems and the solutions presented in this paper are readily applicable to any microelectromechanical system project involving the fabrication of multi-stack structures of two or more wafers containing intricate geometries and large etched areas.
Proceedings ArticleDOI
A study of multi-stack silicon-direct wafer bonding for MEMS manufacturing
TL;DR: In this article, the problems and solutions presented in this paper are readily applicable to any MEMS project involving the fabrication of multi-stack structures of two or more wafers containing intricate geometries and large etched areas.