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Eugene A. Irene

Researcher at University of North Carolina at Chapel Hill

Publications -  209
Citations -  6491

Eugene A. Irene is an academic researcher from University of North Carolina at Chapel Hill. The author has contributed to research in topics: Ellipsometry & Thin film. The author has an hindex of 41, co-authored 209 publications receiving 6242 citations. Previous affiliations of Eugene A. Irene include École centrale de Lyon & IBM.

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Book

Handbook of Ellipsometry

TL;DR: Polarized Light and Ellipsometry: Optical Physics of Materials- Data Analysis for Spectroscopic Ellipsometers- Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer as mentioned in this paper.
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Thermal oxidation of silicon in dry oxygen growth-rate enhancement in the thin regime. I: Experimental results

TL;DR: The importance of l'epaisseur est independante de l'orientation du substrat, de la densite du dopage et de la pression partielle d'oxygene as mentioned in this paper.
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Electron trapping in SiO2 at 295 and 77 °K

TL;DR: In this article, the electron trapping behavior of SiO2 has been measured as a function of thickness at 295 and 77 °K, and the results indicate bulk traps are dominant at 295 K and traps associated with the Si•SiO2 interface are dominant in 77 Ã 0 K. These observations have been verified using a photo I•V technique.
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A Viscous Flow Model to Explain the Appearance of High Density Thermal SiO2 at Low Oxidation Temperatures

TL;DR: In this paper, a consistent model for the formation of this material is deduced based on the following: the temperature dependence of the density, the annealing behavior of the higher density, and new measurements of the intrinsic stress in films.