scispace - formally typeset
F

Fazhi Song

Researcher at Harbin Institute of Technology

Publications -  19
Citations -  147

Fazhi Song is an academic researcher from Harbin Institute of Technology. The author has contributed to research in topics: Iterative learning control & Computer science. The author has an hindex of 3, co-authored 11 publications receiving 58 citations.

Papers
More filters
Journal ArticleDOI

Iterative Learning Identification and Compensation of Space-Periodic Disturbance in PMLSM Systems With Time Delay

TL;DR: A novel iterative learning identification method that utilizes the partial but most pertinent information in the error signal is proposed to identify the force ripple in permanent-magnet linear synchronous motor (PMLSM) systems.
Journal ArticleDOI

Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables

TL;DR: A novel data-driven feedforward tuning method that utilizes error data from all past iterations via an integrator in the learning law, yet without the need of the plant model or the sensitivity function is developed in the presence of noise.
Journal ArticleDOI

Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach.

TL;DR: In this paper, a variable-gain iterative feedforward tuning (VGIFFT) method is proposed to achieve high performance regardless of reference variations through feedforward parameterization and especially high robustness against stochastic disturbance and model uncertainty through a variable learning gain.
Journal ArticleDOI

An Internal Model Based Iterative Learning Control for Wafer Scanner Systems

TL;DR: A new iterative learning control (ILC) is proposed, which embeds the reference model rather than the plant model to achieve a good transient performance and a fast convergence and is applied to the precision control of a wafer stage.
Journal ArticleDOI

Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation

TL;DR: In this article , a cross-coupling iterative learning control (ILC) with two inputs and two outputs is proposed and then decomposed into two ILC with the same convergence condition, a master-slave ILC for the reticle stage and an independent learning control for the wafer stage.