F
Federico Corni
Researcher at Free University of Bozen-Bolzano
Publications - 144
Citations - 1344
Federico Corni is an academic researcher from Free University of Bozen-Bolzano. The author has contributed to research in topics: Silicon & Ion implantation. The author has an hindex of 17, co-authored 140 publications receiving 1275 citations. Previous affiliations of Federico Corni include University of Modena and Reggio Emilia.
Papers
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Journal ArticleDOI
Hydrogen and helium bubbles in silicon
Gf Cerofolini,Federico Corni,Stefano Frabboni,Carlo Emanuele Nobili,Giampiero Ottaviani,Rita Tonini +5 more
TL;DR: In this paper, the basic mechanisms responsible for the formation and growth of cavities and bubbles in single-crystalline silicon are reviewed, starting from the loading (ion implantation) and having in mind the formation of the cavities.
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Infrared study of Si-rich silicon oxide films deposited by plasma-enhanced chemical vapor deposition
Adele Sassella,A. Borghesi,Federico Corni,A Monelli,Giampiero Ottaviani,Rita Tonini,Branko Pivac,M. Bacchetta,Luca Zanotti +8 more
TL;DR: In this paper, a single chamber system for plasma-enhanced chemical vapor deposition was employed to deposit different films of SiOx:N,H with 0.85⩽x ⩽1.91, which are studied by Fourier transform infrared transmission spectroscopy.
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Hydrogen-related complexes as the stressing species in high-fluence, hydrogen-implanted, single-crystal silicon
Gf Cerofolini,Laura Meda,Roberto Balboni,Federico Corni,Stefano Frabboni,Giampiero Ottaviani,Rita Tonini,M. Anderle,Roberto Canteri +8 more
TL;DR: The displacement field in the crystal is found to depend on the direct radiation damage, the extended defects formed after ion implantation (revealed by transmission electron microscopy), and the implanted species.
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Formation of vacancy clusters and cavities in He-implanted silicon studied by slow-positron annihilation spectroscopy
Roberto S. Brusa,Grzegorz P. Karwasz,Nadia Tiengo,Antonio Zecca,Federico Corni,Rita Tonini,G. Ottaviani +6 more
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Helium-implanted silicon: A study of bubble precursors
Federico Corni,G Calzolari,Stefano Frabboni,Carlo Emanuele Nobili,Giampiero Ottaviani,Rita Tonini,Gf Cerofolini,D Leone,M Servidori,R. S. Brusa,G. P. Karwasz,N Tiengo,Antonio Zecca +12 more
TL;DR: The interaction of helium atoms with the radiation damage imparted to (100) silicon single crystal by He+ implantation at 5×1015 cm−2, 20 keV, and liquid-nitrogen temperature is investigated by means of various complementary techniques during and after thermal treatments as discussed by the authors.