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Showing papers by "Helmut Seidel published in 2005"


Journal ArticleDOI
TL;DR: In this paper, the influence of substrate properties (e.g. roughness characteristics and chemical composition) on the electrical resistivity of evaporated molybdenum thin films is investigated as a function of varying parameters, such as film thickness (25-115 nm) and post-deposition annealing with temperatures up to TPDA = 900 °C.

30 citations


Proceedings ArticleDOI
05 Jun 2005
TL;DR: In this article, a miniaturized injection quantity sensor based on the electrothermal measurement principle was developed, which consists of a thin film metallization of titanium/platinum on a low temperature co-fired ceramics (LTCC) substrate.
Abstract: For a further optimization of the internal combustion process of automobiles, a miniaturized injection quantity sensor based on the electro-thermal measurement principle was developed. It consists of a thin film metallization of titanium/platinum on a low temperature cofired ceramics (LTCC) substrate. For high-precision fuel quantity measurements, the sensor chip was integrated into a finished common rail diesel injection nozzle. The micro-flow sensor proved its high performance over the complete fuel quantity map of a high pressure hydraulic injection system up to injection pressures of 135 MPa (1350 bar). For the evaluation of the sensor signals, an injection amount indicator integrated into the hydraulic test bench was used.

2 citations


Patent
22 Sep 2005
TL;DR: In this article, a selection oscillator with tines arranged at a distance and connected with each other by a base is used to measure the coriolis force of a torsion oscillator.
Abstract: The sensor has a selection oscillator (24) with tines (21a, 21b) that are arranged at a distance and connected with each other by a base (22). A bar (13) connects an excitation oscillator (11) with the base of the oscillator (24), and piezoelectric films (12a, 12b) are provided. The excitation (11) moves around a bar axis (15) during torsion oscillation, so that the base oscillates around the axis such that the tines are moved in a direction radial to the axis based on coriolis force. A direct voltage is applied to the oscillator (11) that is provided with electrodes.

2 citations


Patent
23 Feb 2005
TL;DR: In this paper, a tuning-fork shaped excitation oscillator with two prongs connected to each other via a common base was used to transmit a single-input single-output (SIMO) signal.
Abstract: The sensor includes a tuning-fork shaped excitation oscillator with two prongs (11a,11b) connected to each other via a common base (12). A torsion transmission device (23,25a,25b) comprises a torsion bar (23) placed on the base (12) of the excitation oscillator so that the torsion bar is connected to a substrate (1) via a fixture (4). Transmission elements (25a,25b) are arranged adjacent to the torsion bar, on opposite sides, and are also placed against the base of the excitation oscillator.

1 citations


Patent
22 Sep 2005
TL;DR: In this article, a sensor has an excitation oscillator with two prongs connected with one another by a base, which is arranged to displace the excitation unit and the prongs in the lateral oscillation.
Abstract: The sensor has an excitation oscillator (30) with two prongs (11a, 11b), which are connected with one another by a base (12). A bar (21) connects the base with a substrate (1). An excitation unit (14) excites the prongs in opposed lateral oscillation. The prongs move based on Coriolis force perpendicular to direction of lateral oscillation, by swiveling the sensor around an axis perpendicular to the axis of the bar. The prongs are connected to the base by a bridge (13), which is arranged to displace the excitation unit and the prongs in the lateral oscillation.

1 citations


Patent
07 Oct 2005
TL;DR: A method for coating electrically insulating substrates by CVD or PVD, in which before the CVD-or PVD-coating process, micro-heating elements (2) are formed on a ceramic substrate (1) via/over which energy is released on the surface of the substrate to be coated as mentioned in this paper.
Abstract: A method for coating electrically insulating substrates by CVD or PVD, in which before the CVD- or PVD-coating process, micro-heating elements (2) are formed on a ceramic substrate (1) via/over which during the CVD- or PVD-coating process energy is released on the surface of the substrate to be coated Independent claims are included for the following (1) (A) A substrate coated by CVD or PVD and (2) (B) Application of substrates coated by CVD or PVD as micro-sensors or micro-actuators