Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.

Principles of Lithography

The Vertical System Integration (VSI) invention herein is a method for integration of disparate electronic, optical and MEMS technologies into a single integrated circuit die or component and wherein the individual device layers used in the VSI fabrication processes are preferably previously fabricated components intended for generic multiple application use and not necessarily limited in its use to a specific application. The VSI method of integration lowers the cost difference between lower volume custom electronic products and high volume generic use electronic products by eliminating or reducing circuit design, layout, tooling and fabrication costs.

Vertical system integration

The present invention provides OLEDs of the top emission type comprising organic light-emitting (LE) elements by preventing the problems such as the widening of the power lines, the reduction in the aperture ratio caused by the widening of the upper and the lower capacitor electrodes and the short circuit between the upper and the lower electrodes caused by the roughness of the flattening layers. Two kinds of the OLEDs are provided. One is an OLED comprising a region of LE layer sandwiched between the upper and lower electrodes is formed on a power line of TFT for driving the pixel. Another comprises a region of the LE layer formed on an electrode of capacitor connected to the TFTs to control the light-emitting element. Accordingly, without forming a flattening layer on the light-emitting layer, there is no electric short circuit between the lower electrode and the upper electrode.

Organic Light Emitting Display Device

An organic light emitting display is capable of reducing power consumption. The organic light emitting display includes a scan driver for sequentially supplying scan signals to scan lines, a data driver for supplying data signals to data lines in synchronization with the scan signals, pixels located at crossing regions of the scan lines and the data lines, a timing controller for determining a normal driving mode for displaying a normal image and a standby driving mode displaying less information than the normal image, and a power source for supplying a first power and a second power to the pixels, wherein a voltage difference between the first power and the second power in the normal driving mode is a first voltage, and a voltage difference between the first power and the second power is a second voltage different from the first voltage.

Organic light emitting display and method of driving the same

By doping an organic compound functioning as an electron donor (hereinafter referred to as donor molecules) into an organic compound layer contacting a cathode, donor levels can be formed between respective LUMO (lowest unoccupied molecular orbital) levels between the cathode and the organic compound layer, and therefore electrons can be injected from the cathode, and transmission of the injected electrons can be performed with good efficiency. Further, there are no problems such as excessive energy loss, deterioration of the organic compound layer itself, and the like accompanying electron movement, and therefore an increase in the electron injecting characteristics and a decrease in the driver voltage can both be achieved without depending on the work function of the cathode material.

Light Emitting Device

According to one embodiment, a display device includes a first substrate, a second substrate, a first electrode, a second electrode, a partition electrode, a luminescent layer and a voltage source. The luminescent layer includes a luminescent material emitting light rays due to an electrochemical oxidation or reduction reaction thereof. The voltage source is configured to generate a driving voltage between the first and second electrodes so as to apply first and second potentials, wherein the first and second potentials are maintained at one and opposite polarities in respect to the reference potential during a predetermined segment period respectively and are periodically reversed, each of the first and second potentials is changed first to second absolute levels during the predetermined segment period, the second absolute potential is determined depending on the gradation of input image data, and the first absolute potential is higher than the second absolute potential.

Display device and method of driving the same

A method of manufacturing a light emitting device. The method includes: mounting a light emitting chip on a substrate; forming a transparent resin portion and a phosphor layer by using a liquid droplet discharging apparatus, the transparent resin portion being formed in a shape of a dome and covering the light emitting chip to fill an exterior thereof on the substrate, a phosphor layer containing phosphor and being formed on an exterior of the transparent resin portion close to at least a top side thereof; and forming a reflecting layer at a position exterior of the transparent resin portion and the phosphor layer close to the substrate.

Light emitting device and method of manufacturing the same

In a process of manufacturing a plurality of projection masks from a substrate at one time, the substrate is subjected only to wet etching on the reverse thereof to form grooves and is separated into the plurality of the projection masks by the use of the grooves formed on the reverse of the substrate.

Production of projection mask

A high-performance membrane mask for electron projection lithography (EPL) systems is proposed. The design and material selection of the mask described here were carefully executed by considering not only the lithographic performance but also various properties. The mask described in this article consists of a 600-nm-thick diamond-like carbon (DLC) scatter on a DLC membrane 30–60 nm thick. The optimum thicknesses are obtained by calculating angular distributions of the transmitted electrons by our in-house Monte Carlo simulator. It is expected to have an electron transmission of up to 80% and a beam contrast of 100% with an appropriate limiting aperture. A 1-mm-sq membrane of thickness of down to 30 nm could be successfully prepared. The high-performance membrane mask can obtain high resolution and high throughput of the EPL systems simultaneously.

High-performance membrane mask for electron projection lithography

Provided is a mold for imprinting which comprises a substrate provided thereon a flattening layer having a layer made of a flattening agent, wherein the flatting layer is provided thereon a layer having a fine pattern forming layer.

Isao Amemiya

Papers

Display device and method of driving the same

Light emitting device and method of manufacturing the same

Production of projection mask

High-performance membrane mask for electron projection lithography

Mold for imprinting and production method thereof