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J. D. N. Cheeke

Publications -  1
Citations -  13

J. D. N. Cheeke is an academic researcher. The author has contributed to research in topics: Thin film & Microheater. The author has an hindex of 1, co-authored 1 publications receiving 13 citations.

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High-temperature gas sensor using perovskite thin films on a suspended microheater

TL;DR: Suspended microstructures consisting of a thin oxide/nitride diaphragm with embedded polysilicon heaters were designed and fabricated using a standard complementary metaloxide-semiconductor process and simple postprocessing as mentioned in this paper.